Cymer, Inc.

Gregory D Rice

Peter K Shogren

A test fixture for a laser gas module offers automatic and manual testing for individual gas module components. Check or pressure relief valves are tested with an increasing pressure ramp caused by a metered gas flow into a ballast tank. Metering orifices are tested by measuring pressure change in a known volume tank as gas to or from the tank is directed through the orifice under test. The fixture includes capability to test valve logic and leakages. Test sequence and results are monitored on a computer display showing a schematic representation of both module and fixture. Manual control of module and fixture components is done via a computer graphic interface.

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Colorado Springs, CO, United States of America

Gregory D Rice