Stmicroelectronics S.a.

Commissariat a L'energie Atomique

Centre National De La Recherche Scientifique

Centre National De La Recherche Scientifique-cnrs

Grégory Caruyer

Pascal Ancey

Guillaume Bouche

Philippe Robert

Arnaud Devos

Bertrand Dubus

Karim Segueni

Nick Smears

A Micro Electro Mechanical Systems resonance device includes a substrate, and an input electrode, connected to an alternating current source having an input frequency. The device also includes an output electrode, and at least one anchoring structure, connected to the substrate. The device further includes a vibratile structure connected to an anchoring structure by at least one junction, having a natural acoustic resonant frequency. The vibration under the effect of the input electrode, when it is powered, generates, on the output electrode, an alternating current wherein the output frequency is equal to the natural frequency. The vibratile structure and/or the anchoring structure includes a periodic structure. The periodic structure includes at least first and second zones different from each other, and corresponding respectively to first and second acoustic propagation properties.

Micro-electromechanical resonance device with periodic structure

The invention relates to a device consisting of an electromechanical microswitch comprising mobile beam (). According to the invention, at least part () of the beam forms the piezoelectric element of a piezoelectric actuator.

Assembly of a microswitch and of an acoustic resonator

The invention relates to a structure characterising device comprising means which are used for generating a first pump radiation and a second probe radiation and for transmitting different wavelength radiation, means for producing a time offset between said first pump and second probe radiation on the structure by means of detecting means of said second beam after the reflection or transmission thereof to said structure in such a way that an analysis signal is generated, means for processing said signal and identifying an area corresponding to the signal jump, for determining the jump amplitude according to different wavelengths, for comparing said amplitude with a theoretical amplitude variation pattern according to the wavelengths and for determining, for the wavelength characteristic for said theoretical pattern, a characteristic value associated to the structure thickness and to the radiation propagation velocity in said structure.

Method and device for characterising a structure by wavelength effect in a photoacoustic system

Acoustic resonator device () includes an active element () and a support provided with a membrane (). The active element () is provided with at least one piezoelectric layer () and is surmounted by a multilayer stack (). The multilayer stack () is provided with at least three layers, including at least one layer () of high acoustic impedance and at least one layer () of low acoustic impedance. An integrated circuit including at least one such acoustic resonator device is also disclosed.

Acoustic resonator device

A supportfor an acoustic resonatorincludes at least one bilayer assembly having a layer of high acoustic impedance materialand a layer of low acoustic impedance materialmade of material having a low electrical permittivity.

Acoustic resonator support, acoustic resonator and corresponding integrated circuit

An acoustic resonator assembly includes a layer of high-acoustic-impedance material and a layer of low-acoustic-impedance material made of a low-electrical-permittivity material. This assembly may support the resonator over an interconnect layer or act as a decoupling assembly between two active elements of the resonator. The assembly may alternatively include three low-acoustic impedance layers. Alternatively, the assembly may include three acoustic impedance layers wherein two of the layers are low acoustic impedance layers and the third layer has a higher acoustic impedance than the first two or alternatively is a high-acoustic impedance layer.

Support and decoupling structure for an acoustic resonator, acoustic resonator and corresponding integrated circuit

The resonator comprises a piezoelectric layer arranged between two electrodes. An electrical heating resistor is arranged in thermal contact with at least one of the electrodes. Temporary heating of the electrode enables the material constituting the electrode to be partially evaporated, so as to thin the electrode and thus adjust the resonance frequency. Measurement of the resonance frequency in the course of evaporation enables the heating to be interrupted when the required resonance frequency is obtained. One of the electrodes can be arranged on a substrate formed by an acoustic Bragg grating. The resonator can comprise a substrate comprising a cavity whereon one of the electrodes is at least partially arranged.

Bulk acoustic resonator with matched resonance frequency and fabrication process

An electronic component () includes a substrate () and at least two piezoelectric resonators () each having an active element (), a lower electrode () and an upper electrode (). The lower electrode () of the first resonator () is made of a material that is different from that of the lower electrode () of the second resonator () such that the resonators exhibit different resonance frequencies.

Electronic component having a resonator and fabrication process

A process for manufacturing a resonator including the steps of: forming on an insulating substrate a first portion of a conductive material and a second portion of another material on the first portion; forming an insulating layer having its upper surface flush with the upper part of the second portion; forming by a succession of depositions and etchings a beam of a conductive material above the second portion, the beam ends being on the insulating layer on either side of the second portion, the upper surface of the second portion being exposed on either side of the beam, a third portion of a piezoelectric material on the beam and a fourth portion of a conductive material on the third portion above the beam portion located above the second portion; and removing the second portion.

Method for forming a tunable piezoelectric microresonator

A device comprising a resonator formed of a piezoelectric layer sandwiched between two metal electrodes, the resonator being laid on a suspended beam, the device comprising means for deforming said beam by the difference in thermal expansion coefficients.

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Goncelin, France

Grégory Caruyer