Air Products and Chemicals, Inc.

Other

Gregory C Hoffman

Justice N Carman

Mark A Logan

Vacuum furnace bottle

The present invention involves apparatus and methods for introducing ion source material into an ion implant system for use in connection with Freeman type sources. A vaporizer unit which is removable from the system is prepared for insertion into the ion implant equipment outside the system. It is cleaned, a new vial of ion source material is introduced and it may be pre-heated to degas it or to prepare it for use in the system. The vaporizer unit which is currently in use is removed, to be cleaned and recharged, and the previously prepared vaporizer unit is inserted, sealed in place and the vacuum established. The ion implant system is, then, ready to resume operation with minimal down time. The vaporizer unit comprises a vaporizer block of high heat conductive material such as copper which includes three cavities or wells. One cavity contains a heater, one a gas flow path for heating and/or cooling, and one contains a sealed vial of semiconductor dopant. Wells for temperature sensors are also provided, as are means for breaking or puncturing the vial once the ion implant system is ready for operation. The evaporator block is mounted, when in use, in the vacuum chamber of the ion implant device, and is connected through gas-tight seals with a face plate which forms a seal closing the vacuum chamber and supporting the vaporizer block. An external operator is provided for transmitting movement into the system for breaking the vial at the desired time.

Semiconductor dopant vaporizer

A mount for supporting a handgun and holster adjacent to the edge of the user's bed comprising a horizontal support plate, a vertical barrier plate extending vertically from the end of the horizontal support plate configured to lie against the outer vertical edge of the mattress, a spacer portion extending outwardly from the upper edge of the vertical barrier plate and a holster mount portion extending upwardly at an angle of about 45 degrees from the outward edge of the spacer portion to receive thereupon a handgun holster is disclosed.

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San Marcos, CA, United States of America

Gregory C Hoffman