Sandia Corporation

The United States of America As Represented by the United States

Other

University of New Mexico

Gregory C Frye

Stephen J Martin

Thomas W Bein

Richard W Cernosek

C Jeffrey Brinker

Kent Bryant Pfeifer

Michael A Butler

Daniel H Doughty

James J Wiczer

Thomas W Schneider

Mary A Mitchell

Charles T Gebert

Leonard Casaus

Karin Moller

Charles Jeffrey Brinker

James H Smith

Antonio J Ricco

W Kent Schubert

Andrea E Hoyt

Kelly D Brown

A non-piezoelectric flexural plate wave apparatus having meander-line transducers mounted on a non-piezoelectric membrane. A static magnetic field is directed perpendicularly to the conductive legs of the transducers in the plane of the membrane. Single-port, two-port, resonant, non-resonant, eigenmode, and delay-line modes may be employed.

Magnetically excited flexural plate wave apparatus

A pair of thickness-shear mode resonators, one smooth and one with a textured surface, allows fluid density and viscosity to be independently resolved. A textured surface, either randomly rough or regularly patterned, leads to trapping of liquid at the device surface. The synchronous motion of this trapped liquid with the oscillating device surface allows the device to weigh the liquid; this leads to an additional response that depends on liquid density. This additional response enables a pair of devices, one smooth and one textured, to independently resolve liquid density and viscosity; the difference in responses determines the density while the smooth device determines the density-viscosity product, and thus, the pair determines both density and viscosity.

Textured-surface quartz resonator fluid density and viscosity monitor

The acoustic-wave sensor. The acoustic-wave sensor is designed for ambient or vapor-phase monitoring of a photoresist-stripping agent such as N-methylpyrrolidinone (NMP), ethoxyethylpropionate (EEP) or the like. The acoustic-wave sensor comprises an acoustic-wave device such as a surface-acoustic-wave (SAW) device, a flexural-plate-wave (FPW) device, an acoustic-plate-mode (APM) device, or a thickness-shear-mode (TSM) device (also termed a quartz crystal microbalance or QCM) having a sensing region on a surface thereof. The sensing region includes a sensing film for sorbing a quantity of the photoresist-stripping agent, thereby altering or shifting a frequency of oscillation of an acoustic wave propagating through the sensing region for indicating an ambient concentration of the agent. According to preferred embodiments of the invention, the acoustic-wave device is a SAW device; and the sensing film comprises poly(vinylacetate), poly(N-vinylpyrrolidinone), or poly(vinylphenol).

Acoustic-wave sensor for ambient monitoring of a photoresist-stripping

An apparatus and method is provided for separating and analyzing chemical species in an ion mobility spectrometer using a frequency-domain technique wherein the ions generated from the chemical species are selectively transported through an ion flow channel having a moving electrical potential therein. The moving electrical potential allows the ions to be selected according to ion mobility, with certain of the ions being transported to an ion detector and other of the ions being effectively discriminated against. The apparatus and method have applications for sensitive chemical detection and analysis for monitoring of exhaust gases, hazardous waste sites, industrial processes, aerospace systems, non-proliferation, and treaty verification. The apparatus can be formed as a microelectromechanical device (i.e. a micromachine).

Ion mobility spectrometer using frequency-domain separation

A new class of techniques been developed which allow inexpensive application of SAW-type chemical sensor devices while retaining high sensitivity (ppm) to chemical detection. The new techniques do not require that the sensor be part of an oscillatory circuit, allowing large concentrations of, e.g., chemical vapors in air, to be accurately measured without compromising the capacity to measure trace concentrations. Such devices have numerous potential applications in environmental monitoring, from manufacturing environments to environmental restoration.

Method and apparatus for phase for and amplitude detection

Quartz resonator fluid density and viscosity monitor

A precision cleaning apparatus and method. The precision cleaning apparatus includes a cleaning monitor further comprising an acoustic wave cleaning sensor such as a quartz crystal microbalance (QCM), a flexural plate wave (FPW) sensor, a shear horizontal acoustic plate mode (SH--APM) sensor, or a shear horizontal surface acoustic wave (SH--SAW) sensor; and measurement means connectable to the sensor for measuring in-situ one or more electrical response characteristics that vary in response to removal of one or more contaminants from the sensor and a workpiece located adjacent to the sensor during cleaning. Methods are disclosed for precision cleaning of one or more contaminants from a surface of the workpiece by means of the cleaning monitor that determines a state of cleanliness and any residual contamination that may be present after cleaning; and also for determining an effectiveness of a cleaning medium for removing one or more contaminants from a workpiece.

Precision cleaning apparatus and method

Coatings and sensors having both steric and chemical selectivity. Controlled porosity provides the steric selectivity, whereas chemically tailored film properties, using controlled composition or modification by coupling agents, chemical species replacement, or chemical species within pores, provide the chemical selectivity. Single or multiple layers may be provided.

Coatings with controlled porosity and chemical properties

Moisture corrosive gas stream is measured as a function of the difference in resonant frequencies between two acoustic wave (AW) devices, each with a film which accepts at least one of the components of the gas stream. One AW is located in the gas stream while the other is located outside the gas stream but in the same thermal environment. In one embodiment, the film is a hydrophilic material such as SiO.sub.2. In another embodiment, the SiO.sub.2 is covered with another film which is impermeable to the corrosive gas, such that the AW device in the gas stream measures only the water vapor. In yet another embodiment, the film comprises polyethylene oxide which is hydrophobic and measures only the partial pressure of the corrosive gas. Other embodiments allow for compensation of drift in the system.

Acoustic wave (AW) based moisture sensor for use with corrosive gases

The invention relates to a selective chemical sensor for selective detection of chemical entities even at the nanogram level. The invention further relates to methods of using the sensor. The sensor comprises:

Molecular sieve sensors for selective detection at the nanogram level

A method of identification and quantification of absorbed chemical species by measuring changes in both the velocity and the attenuation of an acoustic wave traveling through a thin film into which the chemical species is sorbed. The dual output response provides two independent sensor responses from a single sensing device thereby providing twice as much information as a single output sensor. This dual output technique and analysis allows a single sensor to provide both the concentration and the identity of a chemical species or permits the number of sensors required for mixtures to be reduced by a factor of two.

Dual output acoustic wave sensor for molecular identification

N.sub.2 adsorption isotherms are measured from thin films on SAW devices. The isotherms may be used to determine the surface area and pore size distribution of thin films.

Growing community of inventors

Cedar Crest, NM, United States of America

Gregory C Frye