Leybold Inficon, Inc.

Gregory Adams

Gunter Voss

Stephan J DeLuca

A gas analyzing system that includes a vacuum chamber containing a mass spectrometer and a sampling device for introducing a gas sample into the chamber. A sorption pump is operatively connected to the chamber which is capable of maintaining the chamber at a high vacuum. The pump includes a diffusion barrier that provides smooth pumping characteristics and repeatable short term system behavior when sample pulses are introduced into the system.

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Jamesville, NY, United States of America

Gregory Adams