Fei Comapny

Other

Gregory A Schwind

Sean Kellogg

Gerald G Magera

Kun Liu

James B McGinn

David S Jun

N William Parker

Lynwood W Swanson

Mark Utlaut

Noel S Smith

Anthony Graupera

Shouyin Zhang

Aurelien Philippe Jean Maclou Botman

Luigi Mele

Andrew B Wells

Walter Skoczylas

Leon Van Kouwen

Theodore Carl Tessner, Ii

Peter Christiaan Tiemeijer

Alexander Henstra

Pleun Dona

Lawrence Scipioni

Ali Mohammadi-Gheidari

Alan S Bahm

Maarten Bischoff

Gerbert Jeroen Van De Water

Jonathan H Orloff

William N Parker

Sander G Den Hartog

Ronald A Greene

Lynwood Swanson

Ii Theodore Tessner

Aurélien Botman

An electron source has an insulating base, a pair of conductive terminals, an insulating support member, a drift isolation member, an emitter-cathode, and one or more heating elements. The conductive terminals are exposed from a first surface of the insulating base. The insulating support member extends from the first surface of the insulating base. The drift isolation member is disposed at an end of the insulating support member remote from the insulating base. The emitter-cathode is coupled to the drift isolation member. The one or more heating elements are coupled to the conductive terminals and the drift isolation member. The combination of the drift isolation member with the insulating support member can prevent stress-induced drift from impacting position of the emitter-cathode, thereby improving the mechanical stability of the electron source.

Mechanically-stable electron source

A charged particle microscope and a method of operating a charged particle microscope are disclosed. The microscope employs a source for producing charged particles, and a source lens below the source to form a charged particle beam which is directed onto a specimen by a condenser system. A detector collects radiation emanating from the specimen in response to irradiation of the specimen by the beam. The source lens is a compound lens, focusing the beam within a vacuum enclosure using both a magnetic lens having permanent magnets outside the enclosure to produce a magnetic field at the beam, and a variable electrostatic lens within the enclosure.

Gun lens design in a charged particle microscope

A collision ionization source is disclosed herein. An example source includes an ionization region arranged to receive a gas and a charged particle beam, the charged particle beam to ionize at least some of the gas, and a supply duct arranged to provide the gas to the ionization region, the supply duct having a non-uniform height decreasing from an input orifice to an output orifice, the output orifice arranged adjacent to the ionization region.

Collision ionization source

A collision ionization ion source comprising:

Collision ionization ion source

A high brightness ion source with a gas chamber includes multiple channels, wherein the multiple channels each have a different gas. An electron beam is passed through one of the channels to provide ions of a certain species for processing a sample. The ion species can be rapidly changed by directing the electrons into another channel with a different gas species and processing a sample with ions of a second species. Deflection plates are used to align the electron beam into the gas chamber, thereby allowing the gas species in the focused ion beam to be switched quickly.

Multi species ion source

An inductively coupled plasma charged particle source for focused ion beam systems includes a plasma reaction chamber with a removably attached source electrode. A fastening mechanism connects the source electrode with the plasma reaction chamber and allows for a heat-conductive, vacuum seal to form. With a removable source electrode, improved serviceability and reuse of the plasma source tube are now possible.

Method for attachment of an electrode into an inductively-coupled plasma

An insulating window panel for removable installation into a custom size window opening recess includes longitudinally extending frame pieces configured with joints for interconnecting the frame pieces to form a frame around a transparent flexible glazing sheet. Each frame piece has a longitudinal keder channel with a slot that opens out of a glazing side of each frame piece. The glazing sheet has edges corresponding to the frame pieces; and a keder formed on each of the edges, with a corner cut that spaces apart intersecting kedered edges, all being shaped and sized for sliding each keder edge into the keder channel of each corresponding frame piece such that the frame pieces form joints at the corner cuts and the frame pieces are pulled together at the joints by tension relative to the glazing sheet. Preferably a weatherstrip surrounds the frame perimeter with compressible fins for sealed but removable installation.

Insulating window panel

System for attachment of an electrode into a plasma source

The state of an emitter can be determined by measurements of how the current changes with the extraction voltage. A field factor &#x3b2; function is determined by series of relatively simple measurements of charged particles emitted at different conditions. The field factor can then be used to determine derived characteristics of the emission that, in the prior art, were difficult to determine without removing the source from the focusing column and mounting it in a specialized apparatus. The relations are determined by the source configuration and have been found to be independent of the emitter shape, and so emission character can be determined as the emitter shape changes over time, without having to determine the emitter shape and without having to redefine the relation between the field factor and the series of relatively simple measurements, and the relationships between the field factor and other emission parameters.

Determination of emission parameters from field emission sources

A cold field emission (CFE) electron source for a focused electron beam system such as a transmission electron microscope (TEM), scanning transmission electron microscope (STEM), or scanning electron microscope (SEM) is disclosed. The source employs an emitter enclosure electrode behind the CFE tip which, in conjunction with the extractor electrode, defines a closed volume that can be thoroughly cleaned by electron impact desorption (EID) and radiative heating from a heated filament located between the emitter enclosure electrode and extractor electrode. The extractor electrode may have a counterbore which restricts backscattered electrons generated at the extractor from reaching portions of the source and gun which have not been cleaned by EID. Pre-cleaning of the emitter enclosure electrode and extractor electrode prior to cold field emission substantially improves both source emission stability and frequency noise characteristics, enabling source operation over time intervals adequate for application to TEMs, STEMs, and SEMs.

Stable cold field emission electron source

A stable cold field electron emitter is produced by forming a coating on an emitter base material. The coating protects the emitter from the adsorption of residual gases and from the impact of ions, so that the cold field emitter exhibits short term and long term stability at relatively high pressures and reasonable angular electron emission.

Cold field emitter

Applicants have found that the asymmetrical energy distribution of ions from an ion source allow chromatic aberration to be reduced by filtering ions in the low energy beam tail without significantly reducing processing time. A preferred embodiment includes within an ion beam column a filter that removes the low energy ions from the beam.

Beam quality in FIB systems

A method of batch fabrication using established photolithographic techniques allowing nanoparticles or nanodevices to be fabricated and mounted into a macroscopic device in a repeatable, reliable manner suitable for large-scale mass production. Nanoparticles can be grown on macroscopic 'modules' which can be easily manipulated and shaped to fit standard mounts in various devices.

Method of fabricating nanodevices

Growing community of inventors

Portland, OR, United States of America

Gregory A Schwind