Lam Research Corporation

Vergason Technology, Inc.

Gregory A Pilgrim

Hong Shih

Eric A Pape

Duane Outka

Cliff La Croix

Xiaomin Bin

Girish M Hundi

Joshua B Soper

A multi-layer PVD film stack contains a first layer higher index of refraction metal followed by a second layer semi-transparent lower index of refraction metal. The thickness of the second layer dictates the reflectivity of the second layer material. The second layer not only increases the reflectivity of the first layer, but it also decreases the reflectivity lost when the PVD film is topcoat lacquered. However, lacquering decreases the reflectivity of the higher index first layer (generally n value >1.9 at 632 nm). Using a higher refractive index metal as an opaque first layer followed by a semi-transparent second layer of a lower refractive index metal minimizes the darkening of the metal(s) after lacquer topcoat due to the lower refractive index of the second layer, which is in contact with the lacquer.

Film stack composition, related method, and applications

A method for conditioning ceramic coating on a part for use in a plasma processing chamber is provided. The ceramic coating is wetted with a solution, wherein the solution is formed by mixing a solvent with an electrolyte, wherein from 1% to 10% of the electrolyte dissociates in the solution. The ceramic coating is blasted with particles. The ceramic coating is rinsed.

Method for conditioning a ceramic coating

A substrate support assembly for use in an electrostatic chuck (ESC) in a chamber of a semiconductor manufacturing apparatus is presented for eliminating thermal conductance gas light-up. In one embodiment, the substrate support assembly includes a dielectric block having an upper surface for interfacing with a substrate support surface and a lower surface configured for interfacing with a baseplate. The assembly further includes a plurality of plug channels for introducing gas through the dielectric block to a temperature conduction region between the substrate support surface and a lower surface of the substrate. Each of plug channels contains a ceramic foam plug having a body and a pre-formed pore matrix that is integrally distributed through the body for reducing the mean free path of the gas.

Ceramic foam for helium light-up suppression

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Ithaca, NY, United States of America

Gregory A Pilgrim