Veeco Instruments Inc.

University of California

Bruker Nano Gmbh

Veeco Metrology, Inc.

Gregory A Dahlen

Hao-Chih Liu

William Foreman

Sungho Jin

Rohit Jain

Li-Han Chen

Hao-chih Liu

Tianming Bao

A method and apparatus are provided of characterizing a re-entrant SPM probe tip () through a single scan of a characterizer, thus dramatically increasing throughput, accuracy, and repeatability when compared to prior known tip characterization techniques. The characterizer also preferably is one whose dimensions can be known with a high level of certainty in order to maximize characterization accuracy. These dimensions are also preferably very stable or, if unstable, change catastrophically rather than in a manner that is difficult or impossible to detect. A carbon nanotube (CNT), preferably a single walled carbon nanotube (SWCNT), has been found to be well-suited for this purpose. Multi-walled carbon nanotubes (MWCNTs) () and other structures may also suffice for this purpose. Also provided are a method and apparatus for monitoring the integrity of a CNT.

Method and apparatus for characterizing a probe tip

Sidewall tracing nanoprobes, in which the tip shape of the nanoprobe Is altered so that the diameter or width of the very tip of the probe is wider than the diameter of the supporting stem. Such side protruding probe tips are fabricated by a subtractive method of reducing the stem diameter, an additive method of increasing the tip diameter, or sideway bending of the probe tip. These sidewall tracing nanoprobes are useful for inspection of semiconductor devices, especially to quantitatively evaluate the defects on the side wall of trenches or via holes.

Sidewall tracing nanoprobes, method for making the same, and method for use

A method of extracting the shape of a probe tip of a probe-based instrument from data obtained by the instrument is provided. The method employs algorithms based on the principle that no reconstructed image points can physically occupy the same region as the tip during imaging. Sequential translates of the tip shape or volume sweep out an area or volume that is an 'exclusion zone' similar to morphological erosion. The embodiments of the alternative method use either the region defined by the tip boundary or simply the tip boundary.

Image reconstruction method

A scanning probe microscope's probe tip dimensions as they exist or existed for a certain data or measurement are inferred based on probe activity taking place since a probe characterization procedure was performed. The inferred probe tip dimensions can be used to correct nanoscale measurements taken by the probe to account for changes in the probe's geometry such as wear.

Systems and methods for utilizing scanning probe shape characterization

A method of extracting the shape of a probe tip of a probe-based instrument from data obtained by the instrument is provided. The method generates an image using the data wherein the data is indicative of a characteristic of a surface of a sample. The method then calculates a slope of the image at a particular region and determines, using the slope, a probe contact point between the tip and the sample at that region. In addition, the method further includes the steps of translating the image point based on the probe contact point and repeating the above steps for at least two points in the image data so as to generate a corrected image plot.

Growing community of inventors

Santa Barbara, CA, United States of America

Gregory A Dahlen