Infineon Technologies Ag

Schott Ag

Infineon Technologie Sc300 Gmbh & Co. Kg

Gregor Kübart

Holger Wegener

Jürgen Vogt

Thomas Wiegel

Michael Lering

Georg Helmut Sparschuh

Rainer Schwertfeger

Georg Sparschuh

Angelika Ullmann

Christoph Hocke

Dirk Sprenger

A glass roll includes at least one glass film and one intermediate material one on top of the other in at least two layers onto a winding core. The glass film layers are held in place by the intermediate material layers. The glass roll is produced with a method including provision of a glass film, a winding core and a compressible intermediate material. At least one inside layer of the intermediate material is wound onto the winding core. The glass film and the intermediate material are wound onto the winding core in such a manner that the glass film is wound onto the winding core in alternating layers with the intermediate material. The intermediate material and/or the glass film is wound at a tensile stress acting in a longitudinal direction which causes a compression of the intermediate material and holds the glass film end in place on the glass roll.

Pre-stressed glass roll

An installation for processing a semiconductor wafer includes a semiconductor fabrication device having a load port, on which an identity code that can be read optically or through an effective electromagnetic field is stored. A mobile device, for example, a container communicating with the load port or a vehicle for transporting such a container, contains a corresponding reader to determine the identifier. The configuration makes the flexible determination of position within a fabrication facility possible. Also provided is a method for operating the installation.

Installation for processing a semiconductor wafer and method for operating the installation

A system for handling a semiconductor product container contains a handler for transporting and positioning the container. A loading/unloading position requires first support members forming part of a loading/unloading device engaging with second support members forming part of the container. The system contains a detector for detecting reference point positions of the container and a localization device for computing the position of the container from the detected reference point positions, and allows for handling the containers without the need of mounting any support pins on each storage location.

Semiconductor product container and system for handling a semiconductor product container

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Dresden, Germany

Gregor Kübart