Microchip Technology Inc.

Greg Stom

Justin Sato

Yaojian Leng

Bomy A Chen

James Walls

Mel Hymas

Robert P Ma

Walter Lundy

Brian Dee Hennes

Walter E Lundy

Brian Hennes

Justin H Sato

A method for manufacturing a thin film resistor (TFR) module in an integrated circuit (IC) structure may include forming a trench in a dielectric region; forming a TFR element in the trench, the TFR element including a laterally-extending TFR region and a TFR ridge extending upwardly from a laterally-extending TFR region; depositing at least one metal layer over the TFR element; and patterning the at least one metal layer and etching the at least one metal layer using a metal etch to define a pair of metal TFR heads over the TFR element, wherein the metal etch also removes at least a portion of the upwardly-extending TFR ridge. The method may also include forming at least one conductive TFR contact extending through the TFR element and in contact with a respective TFR head to thereby increase a conductive path between the respective TFR head and the TFR element.

Aluminum compatible thin-film resistor (TFR) and manufacturing methods

A method for manufacturing a thin film resistor (TFR) module in an integrated circuit (IC) structure is provided. A TFR trench may be formed in an oxide layer. A resistive TFR layer may be deposited over the structure and extending into the trench. Portions of the TFR layer outside the trench may be removed by CMP to define a TFR element including a laterally-extending TFR bottom region and a plurality of TFR ridges extending upwardly from the laterally-extending TFR bottom region. At least one CMP may be performed to remove all or portions of the oxide layer and at least a partial height of the TFR ridges. A pair of spaced-apart metal interconnects may then be formed over opposing end regions of the TFR element, wherein each metal interconnect contacts a respective upwardly-extending TFR ridge, to thereby define a resistor between the metal interconnects via the TFR element.

Thin-film resistor (TFR) module with top-side interconnects connected to reduced TFR ridges and manufacturing methods

A method of forming a memory cell, e.g., flash memory cell, may include (a) depositing polysilicon over a substrate, (b) depositing a mask over the polysilicon, (c) etching an opening in the mask to expose a surface of the polysilicon, (d) growing a floating gate oxide at the exposed polysilicon surface, (e) depositing additional oxide above the floating gate oxide, such that the floating gate oxide and additional oxide collectively define an oxide cap, (f) removing mask material adjacent the oxide cap, (g) etching away portions of the polysilicon uncovered by the oxide cap, wherein a remaining portion of the polysilicon defines a floating gate, and (h) depositing a spacer layer over the oxide cap and floating gate. The spacer layer may includes a shielding region aligned over at least one upwardly-pointing tip region of the floating gate, which helps protect such tip region(s) from a subsequent source implant process.

Memory cell with oxide cap and spacer layer for protecting a floating gate from a source implant

A method for manufacturing a semiconductor die may have the steps of:&#x2014;Providing a semiconductor substrate;&#x2014;Processing the substrate to a point where shallow trench isolation (STI) can be formed;&#x2014;Depositing at least one underlayer having a predefined thickness on the wafer;&#x2014;Depositing a masking layer on top of the underlayer;&#x2014;Shaping the masking layer to have areas of predefined depths;&#x2014;Applying a photolithograthy process to expose all the areas where the trenches are to be formed; and&#x2014;Etching the wafer to form silicon trenches wherein the depth of a trench depends on the location with respect to the masking layer area.

Method for manufacturing a semiconductor die with multiple depth shallow trench isolation

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Rhododendron, OR, United States of America

Greg Stom