Average Co-Inventor Count = 9.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lam Research Corporation (2 from 3,791 patents)
2 patents:
1. 12500068 - Edge rings providing kinematic coupling and corresponding substrate processing systems
2. 11798789 - Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features