British Nuclear Fuels Plc

The Boc Group, Inc.

Surface Technology Systems Plc

British Nuclear Fuels Plc - Springfield Works

Graham Hodgson

Jyoti Kiron Bhardwaj

Leslie Michael Lea

Richard A Hogle

Robert Glyn Lewin

Paul Gilchrist

Andrew William Shuttleworth

Nicholas Shepherd

Peter Harold Buckley

Robert Dawson

Noel James Leeson

Martin P Hearne

An arrangement for installing and sealing an anode within a fluorine generating electrolytic cell is described, the arrangement comprising: an anode connection member, said anode connection member () passing through an aperture () in a skirt wall () and being in electrical connection with a skirt wall closure member () wherein the skirt wall closure member is sealingly engaged with said skirt wall and is electrically insulated therefrom.

Fluorine cell

In a method of delivering high purity fluorine to a processing system, an on-site fluorine generator supplies high purity fluorine to a fixed storage tank, from which the high purity fluorine is supplied to the processing system. To provide a back up to the fluorine generator, high purity fluorine is also provided in a transportable gas storage vessel, for example, a multi-cylinder pack at a relatively low pressure, typically less than 35 psig. The transportable storage vessel is selectively connected to the fixed storage tank as required to enable the amount of fluorine within the storage tank to be maintained at a desired level.

Method of supplying fluorine

A ClFgas generation system is provided with supply sources of chlorine () (for example a cylinder of compressed chlorine) and fluorine () (for example a fluorine generator) connected into a gas reaction chamber () enabling generation of ClFgas. The reaction chamber has a valved outlet (C) for the supply of the ClFgas to a process chamber for immediate local use.

Chlorotrifuorine gas generator system

A method and system for thermally activating a oxidizing cleaning gas for use in a semiconductor process chamber cleaning process. The oxidizing cleaning gas is thermally activated by reacting the oxidizing cleaning gas with heated inert gas. The resulting thermally activated oxidizing cleaning gas does not readily deactivate, thus providing enhanced cleaning capabilities.

Thermal activation of fluorine for use in a semiconductor chamber

A process for the treatment of a hydrated mixture of a salt which comprises an inorganic fluoride and hydrogen fluoride to remove water from the mixture wherein the salt mixture contains an excess of hydrogen fluoride, which process comprises forming a liquid phase of the said mixture by melting the salt therein and feeding an inert gas through the liquid phase of the mixture.

Dehydration of fluoride mixtures

A process and an electrolytic cell for the production of fluorine. A fluorine-containing electrolyte is passed in non-turbulent flow between an anode and a cathode of the electrolytic cell. The electrolyte emerging from between the anode and the cathode is divided into two streams. One stream emerges adjacent to the anode and has fluorine entrained therein, the other stream emerges adjacent to the cathode and has hydrogen entrained therein. The fluorine and the hydrogen are subsequently separated from their respective streams of electrolyte.

Process and an electrolytic cell for the production of fluorine

In a method of producing uranium (IV) fluoride, a feedstock comprising uranium metal or alloy is dissolved in hydrochloric acid and hydrofluoric acid to produce a clear solution. The solution is heated and excess hydrofluoric acid added to produce a precipitate comprising uranium (IV) fluoride.

Method of producing uranium (IV) fluoride

Ceramic uranium dioxide is produced from uranium metal by steam oxidation of the metal, followed by oxidation in air to produce U.sub.3 O.sub.8, and subsequent reduction in hydrogen of the U.sub.3 O.sub.8 to produce UO.sub.2. The steam environment may be between 250.degree. C. and 500.degree. C., the oxygen-containing environment at 700.degree. C. or below, and the reducing environment at 600.degree. C. or below.

Growing community of inventors

Lancashire, United Kingdom

Graham Hodgson