Intel Corporation

Goutam Paul

Qing Ma

Valluri Ramana Rao

Li-Peng Wang

Ralph Michael Kling

Emily Yixie Shu

Devadas D Pillai

Bimal Dey

Madhav Rangaswami

An apparatus comprising a substrate and an array of vibration sensors formed on the substrate, the array comprising two or more vibration sensors, wherein each vibration sensor in the array has a different noise floor and a different operational frequency range than any of the other vibration sensors in the array. A process comprising forming an array of vibration sensors on a substrate, the array comprising two or more vibration sensors, wherein each of the two or more vibration sensors in the array has a different noise floor and a different operational frequency range than any of the other vibration sensors in the array. Other embodiments are disclosed and claimed.

Silicon micromachined ultra-sensitive vibration spectrum sensor array (VSSA)

A sensor package comprising a micro-electromechanical (MEMS) motion sensor, an analog-to-digital converter coupled to the MEMS motion sensor, and a wireless transceiver coupled to the analog-to-digital converter, wherein the sensor package can wirelessly communicate with one or more wireless receivers and, if present, with one or more other sensor packages. A process comprising attaching one or more sensor packages to one or more vehicles or devices (mobile or stationary), each sensor package comprising a micro-electromechanical (MEMS) motion sensor, an analog-to-digital converter coupled to the MEMS motion sensor, and a wireless transceiver coupled to the MEMS motion sensor; sensing the motion of the one or more vehicles or devices to which each sensor package is attached; and transmitting motion data from the sensor package to a wireless receiver or to another sensor package.

Wireless micro-electromechanical (MEMS) apparatus and method for real time characterization of motion parameters

A system comprising a reticle, a pellicle and a plurality of sensors attached to at least one of the reticle or pellicle. The sensors are configured to sense in-situ strains on the pellicle as the pellicle is mounted to the reticle or frame.

Characterizing in-situ deformation of hard pellicle during fabrication and mounting with a sensor array

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Saratoga, CA, United States of America

Goutam Paul