U.S. Philips Corporation

Balzers Aktiengesellschaft Fur Hochvakuumtechnik Und Dunne Schichten

Gottfried Mollenstedt

Wilhelm Brunger

A charged particle beam apparatus comprising a particle source for generating a particle beam to irradiate a specimen located in a field space of a particle lens of the apparatus is provided with an auxiliary particle source for generating a particle beam of low energy particle to be injected into the lens field space and to be directed to the surface of the specimen by the same lens field.

Charged particle beam apparatus with charge-up compensation

A cathode assembly for electron emission, comprises, a heatable support of high-temperature resistant material, an emitter body of lanthanum hexaboride, and an auxiliary body having a surface contact with both the support and the emitter body, which is made of a third material, comprising a sintered material of the class of carbides, nitrides and borides. The surface contact area between the auxiliary body and the support amounts to at least 1/6 of the surface area of the emitter body.

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Tubingen, Germany

Gottfried Mollenstedt