Hitachi-high-technologies Corporation

Hitachi, Ltd.

Goroku Shimoma

Mitsugu Sato

Tadanori Takahashi

Hideo Todokoro

Tadashi Otaka

Shunichi Watanabe

Masanori Gunji

Masahiro Kawawa

Terumichi Nishino

Takanori Ninomiya

Naoto Yoshida

Tatsuo Horiuchi

Keisuke Kawame

Masayuki Yukii

Taiji Kitagawa

A width-measurement method of reducing or eliminating an error in measurement of a width of an object on a sample resulting from the dimension of the beam diameter, wherein a width-measured value of the object to be width-measured which has been obtained on the basis of a secondary signal obtained from secondary particles emitted from the sample having thereon the object to be width-measured is corrected with a value with respect to a dimension value of a beam diameter.

Method and scanning electron microscope for measuring width of material on sample

Method and scanning electron microscope for measuring dimension of material on sample

An electron microscope resolving power evaluation method for evaluating performance of a scanning electron microscope without resorting to visual sensory analysis for minimizing a difference in deterioration with age and in performance among individual scanning electron microscopes. A specimen is prepared by overlaying materials having different emission coefficients of secondary charged particles such as secondary electrons, backscattered electrons, transmitted electrons, etc., a cross-section including an overlaid material part of thin-film layers having known dimensions is mirror-finished, data of a scanning electron microscopical image of the cross-section, including the overlaid material part is obtained, and then the resolving power performance of the scanning electron microscope is evaluated quantitatively by means of frequency analysis, etc.

Resolving power evaluation method and specimen for electron microscope

Growing community of inventors

Minori, Japan

Goroku Shimoma