Samsung Electronics Co., Ltd.

Gon-Su Kang

Young-Dae Kim

Min-Chul Kim

Sung-Ho Kang

Sang-Cheol Ha

Yong-hun Lee

Sun-Ho Ryu

Hyun-Sub Earm

Kwang-jun Lee

Seung-Se Lee

Ju-Hong Lee

Sung-Yeul An

Sun-Hong Choi

An arc lamp includes an arc tube configured to receive a reaction gas therein, and an anode and a cathode disposed opposite one another within the arc tube and configured to generate an electrical arc. The anode includes an anode head portion extending inwardly from an end portion of the arc tube, and an anode tip portion bonded to the anode head portion and comprising a trench extending in a top surface along a peripheral region of the anode tip portion.

Arc lamp and substrate heating apparatus having the arc lamp

In an analyzing chamber for a mass analyzer, a body of the analyzing chamber may include an inlet through which an ion beam enters and an outlet through which the ion beam leaves. A shielding section may be installed on a sidewall. The shielding section may prevent the ion beam traveling along a path in the body from causing damage to the sidewall of the body. A detector may be interposed between the sidewall of the body and the shielding section. The detector may detect an ion beam leaking through the shielding section. Accordingly, damage to the sidewall of the body may be sufficiently reduced and/or prevented.

Analyzing chamber including a leakage ion beam detector and mass analyzer including the same

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Hwaseong-si, South Korea

Gon-Su Kang