Yale University

International Business Machines Corporation

Texas Tech University System

Golden Kumar

Jan Schroers

Emily R Kinser

Thomas MacKenzie Hodges

Hongxing Tang

Molla Hasan

Rodrigo Miguel Ojeda Mota

Jerzy Blawzdziewicz

The present invention includes composition and methods for the fabrication of very-high-aspect-ratio structures from metallic glasses. The present invention provides a method for nondestructive demolding of templates after thermoplastic molding of metallic glass features.

High-throughput fabrication of patterned surfaces and nanostructures by hot-pulling of metallic glass arrays

An article comprising a bulk metallic glass skin having one or more functional features integrated therein is described and a method of forming the same is described. The one or more functional features exhibit a variation in stiffness between the one or more functional features and the bulk metallic glass skin that is defined by an applied force over an achieved deformation. The stiffness of each of the one or more functional features is at least 1000 times less than an average stiffness of the bulk metallic glass skin.

Property enabled feature integration strategies and their fabrication methods for metallic glasses

A mold structure having high-precision multi-dimensional components which includes a first oxide layer superimposed on a top of a first semiconductor substrate; a second oxide layer superimposed on a top of a second semiconductor substrate; integrated designs patterned in at least one of the oxide layers; and the first and second semiconductor substrates bonded to one another into a three dimensional (3D) mold such that the first oxide layer only makes partial contact with the second oxide layer such that a portion of the first oxide layer avoids contact with the second oxide layer, the portion of the first oxide layer directly opposite a surface portion of the second semiconductor substrate that is free of the second oxide, the 3D mold selectively filled with a filling material to form a molded high-precision multi-dimensional component.

Mold for forming complex 3D MEMS components

A method of processing BMGs in a non-ideal environment (such as air) to create a uniform and smooth surface is provided. By utilizing the contact-line movement and an engineered flow pattern during TPF the method is able to create complex BMG parts that exhibit uniform smooth appearance or even can be atomically smooth. In addition, to mending surface imperfections, this method also eliminates void formation inside the material, allows for the creation of precise patterns of homogeneous appearance, and forms improved mechanical locks between different materials and a BMG.

Method and system based on thermoplastic forming to fabricate high surface quality metallic glass articles

A mold structure having high-precision multi-dimensional components includes: depositing an oxide layer on a top surface of a plurality of semiconductor substrates, patterning a design integrated in one or more of the oxide layers; repositioning the substrates to enable the oxide layers make contact with one another; bonding in sequential order the repositioned substrates using a dielectric bonding, forming a three dimension (3D) mold; filling the 3D mold with filling material and removing the overburden filling material present on a top surface of the component.

The present invention relates to materials, methods and apparatuses for performing imprint lithography using amorphous metallic materials. The amorphous metallic materials can be employed as imprint media and thermoplastic forming processes are applied during the pattern transfer procedure to produce micron scale and nanoscale patterns in the amorphous metallic layer. The pattern transfer is in the form of direct mask embossing or through a serial nano-indentation process. A rewriting process is also disclosed, which involves an erasing mechanism that is accomplished by means of a second thermoplastic forming process. The amorphous metallic materials may also be used directly as an embossing mold in imprint lithography to allow high volume imprint nano-manufacturing. This invention also comprises of a method of smoothening surfaces under the action of the surface tension alone.

Growing community of inventors

Lubbock, TX, United States of America

Golden Kumar