Taiwan Semiconductor Manufacturing Comp. Ltd.

Godina Ho

Wen-Hao Chen

Yuan-Te Hou

Wen-Ju Preet Yang

Chin-Chang Hsu

Chin-Hsiung Hsu

A portion of a layout of a single layer of an integrated circuit is to be multi-patterned. A method for layout decomposition includes determining spacings between adjacent pairs of patterns, and generating a conflict graph having a plurality of sub-graphs, in which a respective vertex corresponds to each respective sub-graph. The patterns within each respective sub-graph are divided into at least a first group and a second group, each of which is assigned to be patterned on the single layer by a respectively different one of a first mask or a second mask. The method further include determining, in a processor, a count of color-rule violations in the plurality of patterns within each respective sub-graph based on a predetermined set of criteria; and within each sub-graph, assigning the first group of patterns in the sub-graph to the one of the first mask or the second mask which results in a smaller count of color-rule violations.

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Hsinchu, Taiwan

Godina Ho