University of Rhode Island

Greene, Tweed Technologies, Inc.

Godi Fischer

Otto J Gregory

Tao Wei

Mookkan Periyasamy

Elizabeth Sassano

Carmen J Quartapella

Zakary Kinzel

Noah A Burke

Methods, systems and a self-sensing valve assembly are described for monitoring seal life. The method includes providing a valve assembly movable from an open position to a closed position and including a seal seated within the valve and in contact with a surface of the valve assembly, wherein when the seal is in operation it is subject to degradation. At least one sensor is placed for measuring micro strain on a surface of the valve assembly or within the valve assembly. The valve assembly is placed in an operation wherein the seal is subject to degradation and the operation of the valve assembly is initiated. At a time after the operation is initiated, micro strain data is recorded and at least one other property related to a condition selected from an ambient condition of operation and a condition related to degradation of the seal is recorded; and the recorded data is analyzed against baseline data associated with 100% seal life to evaluate seal life at the time after the operation is initiated as a percentage of seal life less than 100%.

Smart seals for monitoring and analysis of seal properties useful in semiconductor valves

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Wakefield, RI, United States of America

Godi Fischer