Kabushiki Kaisha Yaskawa Denki

Other

Go Yamaguchi

Hiromitsu Akae

Osamu Komiyaji

Hidenori Hara

Minoru Koga

Tadataka Noguchi

Sohei Oga

Yuki Honda

Mina Orii

Kensuke Oni

Hiroshi Nakamura

Yoshiaki Kubota

Yoichiro Dan

Takashi Mamba

Ken-ichi Murata

Masaki Ozawa

Ryo Ozono

Ken-ichi Sadakane

A substrate transport system comprises: a linear transport device configured to transport a substrate along a transport line; and a robot configured to receive the substrate from the linear transport device, load the substrate into a processing unit, unload the substrate from the processing unit, and deliver the substrate to the linear transport device, wherein the linear transport device comprises: a first moving body configured to move along the transport line; a second moving body configured to support the substrate; and a non-contact force generator configured to apply a non-contact force to the second moving body from the first moving body to cause the second moving body to follow movement of the first moving body while levitating, by the non-contact force, the second moving body with respect to the first moving body.

Substrate transport system

A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.

Transfer system, transfer method, and transfer apparatus

A robot includes an articulated arm; and a base unit to which the articulated arm is operably coupled. The base unit includes: a rotating portion; an actuator mounted on the rotating portion and configured to rotate the rotating portion about a first axis; an arm connector attached to a first portion of the rotating portion. The articulated arm is connected to the arm connector to swing about a second axis; and a rib straddling the actuator and connecting the arm connector to a second portion of the rotating portion. The actuator is located between the first portion and the second portion of the rotating portion.

Robot

A transport device in a transport chamber having a reduced pressure atmosphere and including a sidewall extending along an arrangement direction. The transport device includes a first robot fixed at a first robot position in the transport chamber and configured to transfer a substrate to and from a first chamber provided outside the transport chamber, and a second robot fixed at a second robot position in the transport chamber and configured to transfer the substrate to and from a second chamber provided outside the transport chamber on the sidewall. Additionally, the transport device includes a mobile buffer configured to hold the substrate and move along a movement locus extending along the arrangement direction and located between the sidewall and each of the first robot position and the second robot position. The movement locus includes a first position for transferring the substrate to and from the first robot and a second position for transferring the substrate to and from the second robot.

Substrate transport with mobile buffer

A robot includes: a first arm that is a horizontal multi-joint type arm provided with a first base link provided to be rotatable around a pivoting axis, a first intermediate link, and a first hand that holds a workpiece W thereon, and configured to move the first hand along a first diameter direction; a second arm that is a horizontal multi-joint type arm provided with a second base link provided to be independently rotatable from the first base link around the pivoting axis, a second intermediate link, and a second hand that holds the workpiece W thereon, and configured to move the second hand along a second diameter direction, and a pivoting device configured to pivot the first arm and the second arm together in the circumferential direction while maintaining a positional relationship of the first arm and the second arm in the circumferential direction.

Robot system, robot controlling method, and semiconductor manufacturing system

A conveying system includes a plurality of carriers and circuitry. The plurality of carriers has a power source generating thrust in accordance with supply of power and moves along a conveying path. The circuitry is configured to execute detection of a collision between the carriers based on an increase in the thrust in the carriers.

Conveying system and method for controlling conveying system

A conveying system includes at least one guide unit and a carrier. The guide unit includes a traveling surface, at least one guide rail, and a magnetic member formed of a soft magnetic material and including a plurality of salient poles aligned along a conveying path. The carrier includes at least one roller coming in contact with the guide rail from a side direction, at least one wheel coming in contact with the traveling surface, and a plurality of coils provided to overlap with the magnetic member in plan view, and configured to generate thrust along the conveying path and attraction toward the magnetic member by generating a moving magnetic field acting on the magnetic member in accordance with supply of power.

Conveying system and method for constructing conveying equipment

The robot hand includes a frame and finger units which are provided on the frame and grasp an object to be grasped. The finger units include a Scott Russell mechanism, a first parallel link mechanism, and a second parallel link mechanism.

Robot hand and robot

This disclosure discloses a robot hand of underactuated mechanism. The robot hand includes a plurality of actuators, a plurality of joints where the number of the joints is more than the number of the actuators, a palm portion, three finger portions each including a plurality of links having bases coupled to the palm portion and coupled being capable of flexion, and a shape-fitting mechanism which is provided in at the finger portion, and which enables to grasp an object to be grasped in an enclosing manner with the finger portions by performing providing torsional displacement to the links.

Growing community of inventors

Fukuoka, Japan

Go Yamaguchi