Tokyo Electron Limited

Tokyo Electronics Limited

Go Ayabe

Kouji Takuma

Yoshifumi Amano

Minoru Tashiro

Kazuya Goda

Kunihiko Fujimoto

Jong Won Yun

Nobuya Yamamoto

Ryo Manabe

There is provided a substrate processing apparatus, including: a mounting part on which a carrier having a plurality of slots capable of accommodating a plurality of substrates is mounted; a transfer part configured to load and unload the substrates to and from the plurality of slots based on a reference accommodation position set in the mounting part; a detection part configured to detect a position of each of the plurality of substrates accommodated in the plurality of slots; and a correction part configured to correct the reference accommodation position based on port accumulation information in which detection results obtained by the detection part from a plurality of carriers which has been mounted on the mounting part in the past are accumulated.

Substrate processing apparatus and substrate processing method

A substrate processing apparatusincludes processing unitseach configured to process a wafer W; tanksandeach configured to store a processing liquid; processing liquid supply unitsandeach configured to supply the processing liquid into the processing unit; drain unitsandeach configured to drain the processing liquid; supplement unitsandeach configured to supplement the tanksandwith the processing liquids; and a control unit. The control unitis configured to perform a process job by controlling the processing liquid supply unitsandand the processing unitand perform, when predetermined liquid exchange conditions are met during the performing of the process job, a liquid exchange processing in parallel with the process job by controlling the drain unitsandand the supplement unitsand

Substrate processing apparatus, substrate processing method and recording medium of performing liquid exchange processing according to liquid exchange condition

A substrate processing apparatus according to the present disclosure includes a holding unit, a nozzle, a driving unit, and a controller. The holding unit holds a substrate. The nozzle supplies a processing liquid to the substrate held on the holding unit. The driving unit moves the nozzle. The controller controls the driving unit, so as to move the nozzle while supplying the processing liquid to the substrate from the nozzle. Further, the controller controls the driving unit based on recipe information including step information including positions of first and second points above the substrate, total time for moving the nozzle between the first and second points, and a moving speed of the nozzle, so as to cause reciprocation of the nozzle.

A liquid processing apparatus includes a plurality of liquid processing units, a plurality of individual exhaust paths, a common exhaust path, a first outside air intake section, a first regulation valve, a second outside air intake section, and a second regulation valve. The liquid processing units perform a liquid processing on a processing target object. An exhaust gas from an inside of the liquid processing unit flows in the individual exhaust paths. The exhaust gas from the individual exhaust paths flows in the common exhaust path. The first outside air intake section is formed at the most upstream side to introduce outside air. The first regulation valve is provided in the first outside air intake section. The second outside air intake section is formed at a downstream side of the common exhaust path from the connection. The second regulation valve is provided in the second outside air intake section.

Liquid processing apparatus

A substrate processing apparatus includes a substrate processing device, a substrate accommodation-status detection device, a substrate-transport device including a first substrate-transport sub-device which unloads substrates from a carrier and a second substrate-transport sub-device which unloads the substrates from the carrier, a control device including processing circuitry which controls the first and second substrate-transport sub-devices based on detection result of the substrate accommodation-status detection device. The processing circuitry of the control device determines a selection, based on the result of the substrate accommodation-status detection device, between a process in which the processing circuitry of the control device simultaneously drives the first and second substrate-transport sub-devices such that the first and second substrate-transport sub-devices simultaneously unload the substrates from the carrier and a process in which the processing circuitry of the control device drives only the second substrate-transport sub-device such that only the second substrate-transport sub-device unloads the substrates from the carrier.

Growing community of inventors

Koshi, Japan

Go Ayabe