Brooks Automation Gmbh

Bae Systems Information and Electronic Systems Integration Inc.

Simplex Time Recorder Co.

Glenn L Sindledecker

Daniel A Hall

Christopher A Hofmeister

William John Fosnight

Matthew W Coady

Steven J Allen

Jeff G Araujo

Michael Spinazola

Marcello Trolio

Gerard M Perron

David J Korwan

Gerard A Esposito

Bruce W Baran

Walter P Gauthier

David E Thompson

Radu R Tenenbaum

Gerard J Pelletier

Sixing She

The system and method for cooling a laser using a split liquid cooled heat exchanger. The temperature of coolant entering the system is applied to a portion of the system most in need of lower temperatures and a second heat exchanger uses the outflow from the first heat exchanger to cool a remaining portion of the system that has a tolerance for higher temperatures. The laser cooling system is compact, e.g., less than 45 cubic inches and can handle thermal loads of about 800 W.

Split liquid cooled heat exchanger with thermoelectric cooling controlled temperature

A substrate loading device having a frame, a cassette support, and a user interface. The frame is connected to a substrate processing apparatus. The frame has a transport opening through which substrates are transported between the device and processing apparatus. The cassette support is connected to the frame for holding at least one substrate holding cassette. The user interface is arranged for inputting information, and is mounted to the frame so that the user interface is integral with the frame.

Load port module

Techniques and structures to facilitate efficient replacement of windows/domes of optical systems, such as turreted pointer/tracker systems and seekers and other such gimbal-based or fixed targeting systems. The techniques can be implemented, for example, in a mounting ring or bezel, wherein the dome/window center of curvature is actively aligned during assembly to a reference feature on a mounting bezel during the dome-to-bezel alignment. This reference feature then mechanically registers the dome-bezel assembly to a given chassis. In some embodiments, the techniques allow for positioning of a replacement window/dome on an optical lens system, such that co-boresight of multiple beam paths is automatically maintained.

Replaceable dome assembly

Techniques and architecture are disclosed for implementing an optical dome bezel to interface an optical dome/window and a housing of differing coefficients of thermal expansion (CTEs), In some embodiments, the bezel may comprise a material (e.g., Ti-6Al-4V) that is CTE-matched to the optical dome material (e.g., silicon, germanium, sapphire, ALON), thereby mitigating temperature effects on system performance. In some embodiments, the bezel may include a radially compliant flexure feature (e.g., flexure blades, spring-form S-channels), which mitigates physical stress effects (e.g., vibration, thermal expansion/contraction, etc.) on system performance. In some embodiments, the bezel may include an integral environmental sealing feature (e.g., O-ring gaskets), which protects internal optics/electronics from external environmental hazards (e.g., moisture, corrosive substances, particulates, debris). In some embodiments, the bezel may be efficiently and repeatedly removed/replaced while preserving optical system performance. Numerous configurations and variations will be apparent in light of this disclosure.

Optical dome bezel

A substrate processing apparatus has a frame and a load port connected to the frame and adapted to mate a substrate transport container to the frame. The apparatus has transportable storage that is adapted to be removably connected to the frame and fit beneath the load port. The storage may be an enclosure housing electrical, mechanical, or electromechanical devices of the substrate processing apparatus.

Equipment storage for substrate processing apparatus

A load port module is mounted adjacent a process tool for loading semiconductor wafers to the process tool and unloading them from the process tool. The module includes a mounting frame having a charging opening therein for entry into the process tool, a platform having an upper surface for supportively receiving a cassette containing the semiconductor wafers to be passed though the charging opening into the process tool, a selectively operable closure movable between a first position withdrawn from the charging opening allowing the passage therethrough of the semiconductor wafers and a second position overlying the charging opening preventing the passage therethrough of the semiconductor wafers, and a shroud movable between a retracted position fully exposing the platform and its associated cassette and an advanced position fully encompassing the platform and the cassette adjacent the process tool. The shroud serves as a barrier against the passage of particulate matter into the process tool. In one instance, the platform includes a tilt assembly for moving a cassette receiving cradle with the cassette thereon from the first location to a second location at the reception region into the process tool such that the plurality of wafers are then supported in a substantially level orientation. In another instance, the platform is movable in plane between a withdrawn position distant from the charging opening and an advanced position proximate the charging opening.

Ergonomic load port

A system for loading and unloading semiconductor wafers includes a frame having a charging opening, a platform mounted on the frame and movable between a deployed position and a retracted position, and a movable closure for the charging opening for opening and closing a horizontal path through the charging opening. In the deployed position, the platform has a generally level orientation adjacent the charging opening and projects away from the frame for receiving thereon a cassette adapted to support therein a plurality of the semiconductor wafers to be passed though the charging opening. In one embodiment, the platform is elevationally movable on the frame between a retracted lowered position distant from the charging opening and a deployed raised position adjacent the charging opening. In another embodiment, the platform is rotationally movable on the frame between the deployed position having a generally level orientation located generally adjacent the charging opening and the retracted position folded against the frame. The loading and unloading system includes a transport system for advancing a cassette from a remote location and delivering the cassette onto the platform in the deployed position. The transport system includes a nest member for supporting a cassette at spaced apart locations enabling reception therebetween of the platform in the deployed position so that the cassette can selectively be transferred, in one instance, from the nest member to the platform and, in another instance, from the platform to the nest member.

Material transport system

A dual-line time recorder includes a barrel cam, printer, motor, and slide plate. The motor rotates the barrel cam. The rotational motion of the barrel cam translates into lateral movement of the printer in forward and reverse directions. A slide plate is adapted for moving the printer in a transverse direction relative to the barrel cam between a first line of print and a second line of print. After printing in a forward direction along a first line of print, the slide plate shifts the printer for printing along a second line of print in the reverse direction. After printing in a reverse direction, the slide plate shifts the printer back to its original position. The printer is fully programmable for printing a variety of data on the print medium.

Dual-line time recorder

In a pivoting time recorder, an inner frame is erected from a base. A printer assembly interfaces with the inner frame at a pivot. The pivot and printer assembly are suspended over the base, forming a slot for insertion of a document therebetween. The printer assembly includes a barrel cam having a protrusion adapted to interface with a cam follower integrated on the inner frame for raising and lowering the printer relative to the base about the pivot. The barrel cam induces axial movement in a programmable printer adapted to be driven by the barrel cam. A motor rotates the barrel cam for moving the printer axially and for raising and lowering the printer assembly relative to the base. The present invention operates with very little movement--only 2.degree. of rotation about the pivot point, resulting in a more reliable design having a lower manufacturing cost in comparison to time recorders of the prior art.

Growing community of inventors

Dracut, MA, United States of America

Glenn L Sindledecker