Genus, Inc.

Watkins Johnson

Glenn L Nobinger

Wilbur C Krusell

John M deLarios

Dah-Bin Kao

Michael A McNeilly

Chiko Fan

Ralph K Manriquez

Melvin C Schmidt

Lingqian Qian

A method for achieving greater uniformity and control in vapor phase etching of silicon, silicon oxide layers and related materials associated with wafers used for semiconductor devices comprises the steps of first cleaning the wafer surface to remove organics, followed by vapor phase etching. An integrated apparatus for cleaning organic and, subsequently, vapor phase etching, is also described. In embodiments of the invention cooling steps are incorporated to increase throughput, an on-demand vaporizer is provided to repeatably supply vapor at other than azeotropic concentration, and a residue-free etch process is provided.

Organic preclean for improving vapor phase wafer etch uniformity

A method of forming a fluorinated silicon oxide dielectric layer by plasma chemical vapor deposition. The method includes the steps of creating a plasma in a plasma chamber and introducing a silicon-containing gas, a fluorine-containing gas, oxygen and an inert gas such that the gases are excited by the plasma and react proximate a substrate to form a fluorinated silicon oxide layer on the surface of the substrate. The fluorinated layer formed has a dielectric constant which is less than that of a silicon oxide layer.

Method of forming a fluorinated silicon oxide layer using plasma

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Santa Clara, CA, United States of America

Glenn L Nobinger