International Business Machines Corporation

Glenn F Guhman

Madhukar L Joshi

Michael Ray

Theodore R Touw

An optical device having a variable index of refraction across its surface includes a light transmissive material with a plurality of regions in the light transmissive material. Each region has an index of refraction which is different from the remainder of the material. The regions may be arranged in the surface of the material such that the density of the regions on the surface varies across the surface. Each region may be a bore, including a hole that extends through the light transmissive material. Variations in the density of the regions or bores as well as the depth and shape of the bores may be utilized to create variations of the refractive index within the light transmissive material. The regions form a refractive lens.

Optical element having regions of different refractive indices for

The present invention encompasses a semiconductor processing device having a processing chamber in which is positioned an electrolyte oxygen pump assembly and tubing for transferring an oxygen containing gas from outside the reaction chamber to within the interior of the electrolyte oxygen pump assembly and tubing for removal of the oxygen depleted gas from within the interior of the electrolyte oxygen pump assembly. In addition, the semiconductor processing tool may further have heating elements for heating a semiconductor substrate within the processing chamber independently from heating of the electrolyte.

Method of fabricating semiconductor device

Reaction chamber having in situ oxygen generation

An optical device having a variable index of refraction across its surface includes a light transmissive material with a plurality of regions in the light transmissive material. Each region has an index of refraction which is different from the remainder of the material. The regions may be arranged in the surface of the material such that the density of the regions on the surface varies across the surface. Each region may be a bore, including a hole that extends through the light transmissive material. Variations in the density of the regions or bores as well as the depth and shape of the bores may be utilized to create variations of the refractive index within the light transmissive material.

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Jericho, VT, United States of America

Glenn F Guhman