Elwha LLC

Lumotive, LLC

Other

Duke University

Metavc Patent Holding Company

Gleb M Akselrod

Erik Edward Josberger

Mark C Weidman

David R Smith

Maiken H Mikkelsen

Prasad Padmanabha Iyer

Lowell L Wood, Jr

Roderick A Hyde

Clarence T Tegreene

Jordin T Kare

Muriel Y Ishikawa

Victoria Y H Wood

Charles Whitmer

Tony S Pan

Yaroslav Aleksandrovich Urzhumov

Patrick Bowen

Yuanmu Yang

Ross D Uthoff

Yizhak Sabba

Tyler Williamson

Apurva Jain

Matthieu Saracco

Lie “Larry” Zhao

Laura Maria Pulido Mancera

Linda Gail Conway

A device may include a dielectric substrate layer with an array of multicoated elongated metal rails extending from the dielectric substrate parallel to one another and spaced from one another to form channels therebetween. The dimensions of the multicoated elongated metal rails and the channels therebetween may be subwavelength with respect to an operational bandwidth. In some examples, each multicoated elongated metal rail is formed with a copper core coated with an optically reflective silver coating followed by a passivation coating. In various examples, a conductive barrier material separates each multicoated elongated metal rail from an underlying dielectric substrate layer. A tunable dielectric material that has a tunable refractive index, such as liquid crystal, is positioned within the channels between adjacent multicoated elongated metal rails.

Multicoated tunable optical devices

According to various embodiments, a tunable optical device comprises a tunable optical metasurface on a substrate with an integrated driver circuit. In some embodiments, the tunable optical device includes a photon shield layer to prevent optical radiation from disrupting operation of the driver circuit. In some embodiments, the tunable optical device includes a diagnostic circuit to detect and disable defective optical structures of the metasurface. In some embodiments, the tunable optical device includes an integrated heater circuit that maintains a liquid crystal of the metasurface above a minimum operating temperature. In some embodiments, the tunable optical device includes an integrated lidar sequencing controller, a steering pattern subcircuit, and a photodetector circuit.

Tunable optical devices with integrated active switch-matrix driver circuits

A metasurface may include a substrate layer and a two-dimensional array of metallic optical pillars arranged in rows and columns. A tunable dielectric material with a tunable refractive index is positioned between row-adjacent optical resonators. A two-dimensional active-matrix driver includes integrated driver routing layer(s), capacitor layer(s), and/or transistor layer(s). The driver routing layers enable row and column addressing of the two-dimensional array of metallic pillars via a row conductor for each row of metallic pillars and a column conductor for each column of metallic pillars. A transistor layer includes transistor devices connected to and configured to be selectively driven by the row and column conductors. The capacitor layer includes a plurality of storage capacitors. Each metallic pillar is connected in parallel to one of the storage capacitors in the capacitor layer and one of the transistor devices in the transistor layer.

Two-dimensional metasurfaces with integrated capacitors and active-matrix driver routing

In various embodiments, a tunable optical surface includes a dielectric substrate layer with an array of elongated metal rails extending from the dielectric substrate parallel to one another and spaced from one another to form channels therebetween. The channels are etched deeper into the dielectric substrate to form extended-depth channels. The depth of each extended-depth channel is greater than the height of adjacent elongated metal rails. The dimensions of the elongated metal rails and the extended-depth channels therebetween may be subwavelength with respect to an operational bandwidth. A tunable dielectric material that has a tunable refractive index, such as liquid crystal, is positioned within the extended-depth channels between adjacent elongated metal rails.

Tunable optical devices with extended-depth tunable dielectric cavities

Subwavelength conducting particles can be arranged on conducting surfaces to provide arbitrary thermal emissivity spectra. For example, a thermal emissivity spectrum can be tailored to suppress a thermal signature of an object without sacrificing radiative cooling efficiency.

Thermal signature control structures

A metasurface may include a substrate layer and a two-dimensional array of metallic optical pillars arranged in parallel rows extending vertically relative to the substrate layer. Gaps between adjacent pillars form optical resonators and a tunable dielectric material is positioned in the optical resonators between the pillars. A reflective layer positioned between the substrate layer and the two-dimensional array of pillars may include a two-dimensional array of elongated rectangular reflector patches arranged in parallel rows with an electrical isolation gap between adjacent rows of reflector patches. The plurality of reflector patches may be arranged lengthwise within each row with an off-resonance gap between adjacent reflector patches. The reflector patches in adjacent rows may be offset with respect to one another, such that the off-resonance gaps between adjacent reflector patches in one row are not aligned with the off-resonance gaps between adjacent reflector patches in an adjacent row.

Two-dimensional metasurface beam forming systems and methods

Optical receivers and transmitters can be used as stand-alone systems or combined together as a transceiver. Each of the receiver and transmitter may include an optically reflective steerable device, such as an optically reflective liquid crystal metasurface (LCM), to steer optical radiation to a target location. A transmit waveguide conveys optical radiation from a light source to the transmitter steerable device. A receive waveguide conveys received optical radiation reflected by the receiver optically steerable device to a sensor. In some embodiments, the transmit waveguide and the receive waveguide may be portions of the same planar waveguide. The receiver includes a holographic lens between the receiver LCM and the receive waveguide to pass through optical radiation received at a first range of incident angles and modify (e.g., collimate and/or spectrally filter) optical radiation reflected by the receiver LCM for conveyance by the receive waveguide to the sensor.

Waveguide-integrated tunable liquid crystal metasurface devices

According to various embodiments, a solid-state light detection and ranging (LiDAR) transmitter includes a tunable optical metasurface to selectively steer incident optical radiation long an azimuth axis. In some embodiments, different subsets of lasers in an array of lasers are activated to generate optical radiation for incidence on the metasurface at different angles of incidence on an elevation axis for unsteered deflection by the metasurface at corresponding angles of elevation. In some embodiments, a prism is positioned relative to the tunable optical metasurface to deflect the optical radiation from the optical assembly by the optical radiation source for incidence on the metasurface at an angle of incidence that is between the first steering angle and the second steering angle, such that the optical radiation incident on the metasurface and the steered output optical radiation from the metasurface spatially overlap within the prism.

Segmented illumination and polarization devices for tunable optical metasurfaces

Coupling prisms for tunable optical metasurfaces

An example optical transceiver system, such as a solid-state light detection and ranging (lidar) system, includes a tunable, optically reflective metasurface to selectively reflect incident optical radiation as transmit scan lines at transmit steering angles between a first steering angle and a second steering angle. In some embodiments, a feedback element, such as a volume Bragg grating element, may lock a laser to narrow the band of optical radiation. A receiver may include a tunable, optically reflective metasurface for receiver line-scanning or a two-dimensional array of detector elements forming a set of discrete receive scan lines. In embodiments incorporating a two-dimensional array of detector elements, receiver optics may direct optical radiation incident at each of a plurality of discrete receive steering angles to a unique subset of the discrete receive scan lines of detector elements.

Lidar systems based on tunable optical metasurfaces

Integrated driver and heat control circuitry in tunable optical devices

Integrated driver and self-test control circuitry in tunable optical devices

According to various embodiments, a cover is sealed over a metasurface on a substrate to create a sealed chamber. Liquid crystal, or another tunable refractive index dielectric material, is positioned within the sealed chamber around optical structures of the metasurface before or after the cover is sealed. For example, the liquid crystal may be injected through small vias or holes to fill a sealed chamber. In some embodiments, a glass cover is shaped or patterned with photoresist to protrude into the sealed chamber to reduce the thickness of the liquid crystal used to fill the sealed chamber. A driver to control the metasurface may be, for example, integrated within the substrate, be attached to exposed bond pads of the metasurface, and/or be embodied as a control layer connected to the metasurface through the substrate by through-substrate vias (TSVs).

Tunable optical device configurations and packaging

According to various embodiments, a tunable optical metasurface includes an array of elongated resonator rails arranged parallel to one another. Liquid crystal is positioned within an optical field region between adjacent resonator rails. A controller can selectively apply a voltage differential pattern to the elongated resonator rails to adjust a phase response thereof. According to various embodiments, a cross-backplane reflector is utilized that allows for mid-array routing or edge-array routing of electrical connections between the controller and the resonator rails. The cross-backplane reflector comprises a plurality of elongated optical reflectors extending parallel to one another and perpendicular to the array of resonator rails. An optically transmissive (e.g., transparent) dielectric may electrically separate the resonator rails from the optical reflectors. A pattern of vias formed therein facilitates electrical connections between the optical reflectors and the resonator rails.

Liquid crystal metasurfaces with cross-backplane optical reflectors

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Bellevue, WA, United States of America

Gleb M Akselrod