Max-planck-gesellschaft Zur F&#xf6;rderung Der Wissenschaften E. V.

Gisela Schuetz

Marcel Mayer

Corinne Grevent

Michael Hirscher

Corinne Grévent

Kahraman Keskinbora

Brigitte Baretzky

The invention concerns to a method of producing a Fresnel Zone Plate () for applications in high energy radiation including the following steps: supply of a substrate () transparent for high energy radiation, deposition of a layer () of a metal, a metal alloy or a metal compound on a planar surface () of the substrate (), calculating a three dimensional geometrical profile () with a mathematical model, setting up a dosage profile () for an ion beam of the ion beam lithography inverse to the calculated three dimensional geometrical profile () and milling a three dimensional geometrical profile () with concentric zones into the layer () with ion beam lithography by means of focused ion beam.

Method of producing a Fresnel Zone Plate for applications in high energy radiation

A method of producing a Fresnel zone plate () comprising:

Method and apparatus for producing a Fresnel zone plate

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Wurmberg, Germany

Gisela Schuetz