Elevated Materials US LLC

Girishkumar Gopalakrishnannair

Wei-Sheng Lei

Subramanya P Herle

David Masayuki Ishikawa

Ezhiylmurugan Rangasamy

Alejandro Sevilla

Exemplary processing methods may include translating a lithium film beneath a first showerhead. The methods may include introducing an oxidizer gas through the first showerhead onto the lithium film. The methods may include forming an oxide monolayer on the lithium film. The oxide monolayer may be or include the oxidizer gas adsorbed on the lithium film. The methods may include translating the lithium film beneath a second showerhead after forming the oxide monolayer. The methods may include introducing a carbon source gas through the first showerhead onto the lithium film. The methods may also include converting the oxide monolayer into a carbonate passivation layer through reaction of the oxide monolayer with the carbon source gas.

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San Jose, CA, United States of America

Girishkumar Gopalakrishnannair