Applied Materials, Inc.

Elevated Materials US LLC

Girish Kumar Gopalakrishnan Nair

Subramanya P Herle

Karl J Armstrong

Ezhiylmurugan Rangasamy

Jean Delmas

David Masayuki Ishikawa

Bernard Frey

Sambhu Kundu

Kent Qiujing Zhao

Daniel Stock

David Alvarez

A method and system for fabricating a pre-lithiated electrode structure are provided. The method includes supplying a first continuous web substrate from an unwinder roller to a winder roller. The first continuous web substrate includes a layer of lithium metal. The method further includes supplying a second continuous web substrate comprising a layer of patterned anode material adjacent to the first continuous web substrate. The first continuous web substrate and the second continuous web substrate are wound together on the unwinder roller, wherein a surface of the layer of anode material contacts a surface of the layer of lithium metal. Pressure is applied to the first continuous web substrate and the second continuous web substrate to pre-lithiate the patterned anode material, wherein applying pressure comprises tensioning at least one of the unwinder roller and the winder roller.

Inline contact pre-lithiation

Metrology systems and processing methods for continuous lithium ion battery (LIB) anode pre-lithiation and solid metal anode protection are provided. In some embodiments, the metrology system integrates at least one complementary non-contact sensor to measure at least one of surface composition, coating thickness, and nanoscale roughness. The metrology system and processing methods can be used to address anode edge quality. The metrology system and methods can facilitate high quality and high yield closed loop anode pre-lithiation and anode protection layer deposition, alloy-type anode pre-lithiation stage control improves LIB coulombic efficiency, and anode coating with pinhole free and electrochemically active protection layers resist dendrite formation.

Web edge metrology

A method and apparatus for fabricating electrodes used in energy storage devices are provided. In some implementations a surface of the electrode is activated for (a) a pre-treatment process to remove loosely held particles from the electrode surface; (b) a pre-treatment process to activate the surface of the electrode material for improved bonding or wetting for subsequently deposited materials; (c) a post-treatment of the pre-lithiation layer to improve subsequent bonding with additionally deposited layer, for example, passivation layers; and/or (d) a post-treatment of the pre-lithiation layer to improve/accelerate absorption of the lithium into the underlying electrode material.

Pretreatment and post-treatment of electrode surfaces

Implementations described herein generally relate to metal electrodes, more specifically lithium-containing anodes, high performance electrochemical devices, such as secondary batteries, including the aforementioned lithium-containing electrodes, and methods for fabricating the same. In one implementation, an anode electrode structure is provided. The anode electrode structure comprises a current collector comprising copper. The anode electrode structure further comprises a lithium metal film formed on the current collector. The anode electrode structure further comprises a solid electrolyte interface (SEI) film stack formed on the lithium metal film. The SEI film stack comprises a chalcogenide film formed on the lithium metal film. In one implementation, the SEI film stack further comprises a lithium oxide film formed on the chalcogenide film. In one implementation, the SEI film stack further comprises a lithium carbonate film formed on the lithium oxide film.

Ex-situ solid electrolyte interface modification using chalcogenides for lithium metal anode

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San Jose, CA, United States of America

Girish Kumar Gopalakrishnan Nair