Credence Systems Corporation

Girish Dajee

Patricia Le Coupanec

Martin D Leibowitz

Methods, apparatus and data structures useful in correcting PICA image data are described. An exemplary method comprises acquiring optical image data of a target having identifiable optical-image features, acquiring PICA image data of the target having identifiable PICA-image features corresponding to the optical-image features, matching PICA-image features with corresponding optical-image features, and calculating from matched PICA-image features and optical-image features a set of coefficients defining relationships between observed positions of PICA-image features and optical-image features. Corrections are applied to the observed positions of detected photons based on the coefficients. The coefficients may provide a local correction using a bilinear relationship giving the transformation of a rectangle formed by four features of the PICA-image data to fit a corresponding rectangle in the optical-image data. Alternatively, the coefficients may provide a global mapping function defining transformation of any point of the PICA-image data to fit a corresponding point in the optical-image data.

Growing community of inventors

San Carlos, CA, United States of America

Girish Dajee