Asml Netherlands B.v.

Giovanna De Simone

Thibault Simon Mathieu Laurent

Ruud Hendrikus Martinus Johannes Bloks

Niek Jacobus Johannes Roset

Justin Johannes Hermanus Gerritzen

Marco Adrianus Peter Van Den Heuvel

A method of unloading an object from a support table, the object clamped to the support table during an exposure process by: applying a first pressure to a central region of the support table under a central portion of the object; and applying a second pressure to a peripheral region of the support table under a peripheral portion of the object, wherein during clamping the first pressure and the second pressure are controlled such that liquid is retained between the object and a seal member that is positioned radially between the central region and the peripheral region at an upper surface of the support table and protrudes towards the object, the method including: increasing the first pressure towards ambient pressure; removing at least some of the liquid retained between the object and the seal member by decreasing the second pressure; and increasing the second pressure towards the ambient pressure.

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Eindhoven, Netherlands

Giovanna De Simone