Samsung Electronics Co., Ltd.

Gilsung Lee

Eunsuk Cho

Dong-Sik Lee

Kangyoon Choi

Sung-Min Hwang

Yongsik Yim

Kihyun Kim

Sunil Shim

Joon-Sung Lim

Jaehoon Jang

Jongwon Kim

Byungyong Choi

Provided is a three-dimensional semiconductor memory device include a first stack structure and a second stack structure adjacent to each other on a substrate, a first common source plug between the first stack structure and the second stack structure, a second common source plug between the first stack structure and the second stack structure, and a vertical dielectric structure between the first common source plug and the second common source plug. Each of the first stack structure and the second stack structure may include a plurality of insulation layers and a plurality of electrodes alternately stacked on the substrate. The first common source plug may be connected to the substrate. The second common source plug may be spaced apart from the substrate.

Three-dimensional semiconductor memory device including first vertical structure on first region of substrate and wider second vertical structure on second region of substrate

A three-dimensional (3D) semiconductor memory device includes a substrate that includes a cell array region and a connection region, a dummy trench formed on the connection region, an electrode structure on the substrate and that includes vertically stacked electrodes that have a staircase structure on the connection region, a dummy insulating structure disposed in the dummy trench, the dummy insulating structure including an etch stop pattern spaced apart from the substrate and the electrode structure, a cell channel structure disposed on the cell array region and that penetrates the electrode structure and makes contact with the substrate, and a dummy channel structure disposed on the connection region and that penetrates the electrode structure and a portion of the dummy insulating structure and that makes contact with the etch stop pattern.

Three-dimensional semiconductor memory device

A semiconductor memory device includes a cell array region and a peripheral circuit region. The cell array region includes an electrode structure including a plurality of electrodes sequentially stacked on a body conductive layer, and vertical structures penetrating the electrode structure so as to be connected to the body conductive layer. The peripheral circuit region includes a remaining substrate on the body conductive layer. The remaining substrate includes a buried insulating layer, and a peripheral active layer that is provided on the buried insulating layer and is substantially single-crystalline.

Semiconductor memory device and method of manufacturing the same

Disclosed is a nonvolatile memory having a memory cell array including a plurality of cell strings, each cell string including memory cells stacked in a direction perpendicular to a substrate, a ground selection transistor between the memory cells and the substrate, and a string selection transistor between the memory cells and a bit line. The memory also includes an address decoder connected to the memory cells, the string selection transistors, and the ground selection transistors, and configured to apply a ground voltage to the string selection lines, word lines, and ground selection line. Further, the memory includes a read/write circuit connected to the string selection transistors through bit lines, and at least one first memory cell maintains a threshold voltage higher than a threshold voltage distribution corresponding to an erase state.

Three-dimensional nonvolatile memory and operating method of three-dimensional nonvolatile memory

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Seoul, South Korea

Gilsung Lee