Commissariat a L'energie Atomique

Commissariat a L'energie Atomique Et Aux Energies Alternatives

Gilles Delapierre

Robert Meyer

Bernard Diem

Patrice Rey

Didier Bloch

Bernard Chambaz

Louis Destannes

Yves Fouillet

Jean-Yves Laurent

Roland Blanpain

Didier Marsacq

Hubert Grange

Francois Perruchot

Marie-Therese Delaye

François Vacherand

France Michel

Thierry Priem

Corinne Gauthier

Christian Perut

Claude Chapuy

A triaxial force sensor including: a deformable membrane; a detector detecting a deformation of the membrane configured to carry out a triaxial detection of the force to be detected; and an adhesion mechanism disposed at least at one of the principal faces of the deformable membrane, configured to secure the one of the principal faces of the deformable membrane to at least one elastomer material to be acted upon by the force to be detected, and distributed uniformly at a whole of the surface of the one of the principal faces of the deformable membrane, the deformable membrane being disposed between a cavity and the elastomer material.

Contact force sensor with an elastomer material secured to a deformable membrane

A pressure sensor micromachined by using microelectronics technologies includes a cavity hermetically sealed on one side by a silicon substrate and on the other side by a diaphragm that is configured to be formed under the effect of the pressure outside the cavity. The sensor includes at least one resistance strain gage fastened to the diaphragm and has resistance that varies as a function of the deformation of the diaphragm. The diaphragm is fastened to the resistance strain gages. The gages are located inside the sealed cavity. The diaphragm has an insulting layer deposited on a sacrificial layer and may cover integrated measurement circuits in the silicon substrate.

Pressure sensor with resistance strain gages

A process for closure of at least one cavity intended to encapsulate or be part of a microelectronic device, comprising the following steps:

Cavity closure process for at least one microelectronic device

The microsystems are integrated in a first cavity bounded by at least a substrate and by a top wall formed by at least a part of a first cover. The component has a second cavity bounded by at least the whole of the top wall of the first cavity and by a second cover formed by a thin layer. The second cover can be covered by a coating made of plastic material molded from a casting. The fabrication process of the component comprises deposition, on the whole of the top wall of the first cavity, of a layer of polymer material and annealing of the layer of polymer material. The layer of polymer material acts as sacrificial layer for deposition of the thin layer designed to form the second cover.

Encapsulation component for integrated micro electromechanical system comprising first and second covers

A microstructure including in a first layer insulated from a substrate by an insulator layer at least one sensitive element connected to at least one contact pad by an electrical connection and protected by a package cap. The sensitive element, the electrical connection, and the contact pad form an assembly delimited in the first layer by at least one trench, the assembly being covered by the package cap. The package cap includes at least one opening above the contact pad and is integral with the contact pad on the edges of the opening and with a zone located beyond the trench in relation to the assembly. Such a microstructure can find application in particular in microelectromechanical structures.

Encapsulated microstructure and method of producing one such microstructure

The fuel cell () is of the kind comprising an anode () and a cathode () between which an electrolyte () is interposed. Solid bodies () storing a hydrogen mass, able to be decomposed by combustion, are associated to pyrotechnic means () to release the hydrogen and bring it into contact with the anode (). Means () tap the ambient air to bring it into contact with the cathode (). Firing of the pyrotechnic means () is placed under the control of addressing means () embedded in the appliance (). The surplus water produced by the exchange between the hydrogen and the oxygen is resorbed by the temperature increase induced by combustion of the bodies (). The solid bodies () are supported by an interchangeable card ().

Fuel cell for powering electronic appliances, in particular portable objects

The module is designed for supplying hydrogen to a fuel mini-cell, wherein hydrogen is gradually released by combustion of elements made of pyrotechnic material, after ignition. A device for sequential control of ignition of the pyrotechnic elements comprises a circuit controlling an electrical or light energy source which supplies an ignition control signal causing energy to be applied to the input of a series of connecting means, respectively associated with each of the pyrotechnic elements. A single pyrotechnic element is connected to the energy source at any one time, the elements preceding it having already been used. The connecting means can be sensitive to temperature or to pressure.

Module for supplying hydrogen to a fuel mini-cell with sequential control of pyrotechnic elements

The component comprises micro electromechanical systems integrated in a cavity of a substrate and a cover sealed onto the substrate and designed to make the cavity hermetic. The cover comprises at least one groove passing through the cover and defining a central zone completely covering the cavity and a peripheral zone in the cover. A sealing material is deposited at least at the bottom of the groove. Fabrication of the component can comprise a first stage of making at least one groove in the cover, a second stage of bringing the substrate and cover into contact, and a third stage of sealing by depositing a sealing material in the bottom of the groove.

Integrated micro electromechanical system encapsulation component and fabrication process of the component

The microvalve comprises a mini-piston moving due to the thrust of gases given off by firing of a pyrotechnic charge and comprising an aperture designed to enable communication to be established between ends of microchannels of a microfluidic component. When the ends between which communication is to be established open out onto a face of a first planar substrate, the mini-piston is formed in a second planar substrate, adjoined to the first, and comprises a part that is mobile in translation or in rotation in the plane of the second substrate. If a transverse slot is arranged between the ends of the microchannels between which communication is to be established, the mini-piston comprises a rod designed to slide in the slot and the aperture is formed by a transverse orifice formed in the rod of the mini-piston.

Pyrotechnically actuated microvalve

This invention relates to a secure electronic device comprising:

Secure electronic device

A device for the detection of movement of a valuable object, for example in a museum in which a device for detecting at least a rotation of the object, and particularly magnetometers or inclinometers, are mechanically fixed to the object. These detecting devices are coupled to a message transmission device that sends a presence message as long as detection has not taken place and an alert type message when detection has taken place. A monitoring station processes these messages or the absence of these messages, to trigger an alert if necessary.

Microsystem using magnetometer and inclinometer for anti-theft protection of valuables

The integrated electromechanical microstructure comprises a base substrate and a cavity closed by a protective cover. Means for adjusting the pressure in the cavity after the protective cover has been sealed comprise at least one element made of pyrotechnic material combustion whereof releases gas into the cavity. The pressure in the cavity can thus be adjusted independently from the sealing process. Selective ignition of the elements made of pyrotechnic material can be achieved by heating electrical resistors or by laser beams coming from outside the microstructure and directed selectively towards the elements made of pyrotechnic material through a transparent zone of the protective cover.

Integrated electromechanical microstructure comprising pressure adjusting means in a sealed cavity and pressure adjustment process

Integrated variable electrical capacitance device and method for producing said device

A process for the micromechanical fabrication of nozzles for ink jets includes forming a groove on a surface of a first substrate, securing the first substrate to a second substrate to form an assembly in which the second substrate covers the groove to form a channel having walls, and then forming an internal protective coating within the channel by thermal oxidation of the walls of the channel. The first and second substrates are then cut along a plane extending perpendicular to the channel thereby to form a nozzle for dispensing a liquid jet. Scales, formed as a result of the cutting operations, are formed on the internal protective coating rather than directly on the walls of the channel. These scales then are removed from the nozzle by eliminating the internal protective coating.

Growing community of inventors

Seyssins, France

Gilles Delapierre