Applied Materials Israel Limited

Gil Sod-Moriah

Yair Eran

Ariel Ben-Porath

Youval Nehmadi

Yaron Cohen

Zamir Abraham

Chen Ofek

The invention provides a method that includes the stages of: (i) receiving design information representative of a portion of an object that includes sub micron measurement targets, (ii) processing the received design information to provide a large number of measurement targets; and (iii) associating target measurement parameters to each of large number of measurement targets. The invention provides a system that includes: (i) an interface for receiving design information representative of a portion of a layer of an object that includes sub micron measurement targets; and (ii) a processor, coupled to the interface, for processing the received design information to provide a large number of measurement targets; and for associating target measurement parameters to each of large number of measurement targets.

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Rehovot, Israel

Gil Sod-Moriah