The University of Texas System

Korea Institute of Industrial Technology

Gil Sik Lee

Lawrence J Overzet

Kyung Hwan Lee

Jae Hak Kim

Yong-Seok Park

Chun-Seong Park

Jong Ho Lee

Byeong Jun Lee

Bum Ho Choi

Behnoush Dousti

Negar Geramifard

Woo Sam Kim

Jung Chan Bae

Effective techniques for patterning carbon nanotube (CNT) sheets are disclosed herein. A carbon nanotube forest is grown on a catalyst-incorporated substrate, CNT sheets are drawn from the carbon nanotube forest, the CNT sheets are stacked on a substrate, followed by etching the CNT sheets by using a shadow mask through a controlled etch process. In some implementations, etching of the CNT sheets is carried out in a capacitively coupled plasma (CCP) etching system, where the CNT sheets are selectively exposed, in a controlled environment, to oxygen plasma via the shadow mask.

Methods to pattern carbon nanotube sheets

Growing spin-capable multi-walled carbon nanotube (MWCNT) forests in a repeatable fashion will become possible through understanding the critical factors affecting the forest growth. Here we show that the spinning capability depends on the alignment of adjacent MWCNTs in the forest which in turn results from the synergistic combination of a high areal density of MWCNTs and short distance between the MWCNTs. This can be realized by starting with both the proper Fe nanoparticle size and density which strongly depend on the sheet resistance of the catalyst film. Simple measurement of the sheet resistance can allow one to reliably predict the growth of spin-capable forests. The properties of pulled MWCNTs sheets reflect that there is a relationship between their electrical resistance and optical transmittance. Overlaying either 3, 5, or 10 sheets pulled out from a single forest produces much more repeatable characteristics.

Method of manufacturing electrodes using carbon nanotube sheets

Tuning of Fe catalysts for growth of spin-capable carbon nanotubes

Disclosed is an atmospheric pressure plasma apparatus for enhancing and or controlling the dissociation of a secondary gas by converting a source gas into a plasma state at atmospheric pressure and controlling the interaction between that plasma and the secondary gas using porous metal, and ceramic tubes to create a path having controllable isolation from the region where plasma is generated.

Atmospheric pressure plasma apparatus

Growing community of inventors

Lewisville, TX, United States of America

Gil Sik Lee