Kla-tencor Technologies Corporation

Gil Delgado

Jim W Li

James Norman Wiley

Charles Nenghe Wang

Qibiao Chen

Greg Kirk

John McMurtry

Rich Solarz

Chris Kirk

Anatoly Schemelinin

Methods and systems for providing illumination of a specimen for a process performed on the specimen are provided. One system configured to provide illumination of a specimen for a process performed on the specimen includes a laser configured to generate excitation light. The system also includes focusing optics configured to focus the excitation light to a plasma in an electrodeless lamp such that the plasma generates light. The system is also configured such that the light illuminates the specimen during the process.

Methods and systems for providing illumination of a specimen for a process performed on the specimen

The invention pertains to mechanisms for protecting surfaces of optical components of an optical inspection system. One aspect of the invention relates to a gas purge system that produces a gas stream that blocks contaminants from reaching the optical surfaces of the optical components and that transports contaminants away from the optical surfaces of the optical components. Another aspect of the invention relates to a transparent cover that physically blocks contaminants from reaching the optical surfaces of the optical components. Yet another aspect of the invention relates to a combination of the gas purge system and the transparent cover.

Method and apparatus for protecting surfaces of optical components

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Livermore, CA, United States of America

Gil Delgado