Applied Materials Israel Limited

Shilat Optronics Ltd.

Gil Blai

Avishay Guetta

Doron Korngut

Yoni Cohen

A system for detecting intrusion across a surface, comprising a plurality of light sources projecting an array of illuminating beams along different optical paths in the surface and a detector array system directed such that it detects along a plurality of fields of view in the surface, illumination reflected from the illuminating beams. A signal processing system detects changes along the array of fields of view, in the reflected illumination level detected by the detector system. An increase greater than a predefined level in the reflected illumination level from any field of view provides an indication of an intrusion across the surveilled surface along that field of view, at the crossing point of the direction of that field of view with the optical path whose illuminating beam generated the increase in reflected illumination from that field of view.

Intrusion warning system

Apparatus for inspecting a surface of a sample, including a detector and folding optics. The folding optics are configured to receive radiation arising from a first region of the surface and from a second region of the surface. The first region and the second region have a first spatial relationship with respect to each other. The folding optics form from the radiation a first image of the first region and a second image of the second region on the detector, wherein the first image is a linear transformation of the first region and the second image is the linear transformation of the second region. The first image and the second image have a second spatial relationship, different from the linear transformation of the first spatial relationship, with respect to each other.

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Ramat Gan, Israel

Gil Blai