Imec Vzw

Universiteit Hasselt

Giedrius Degutis

Rajesh Ramaneti

Marlies Van Bael

Paulius Pobedinskas

Ken Haenen

In a first aspect, the present disclosure relates to a method for forming a diamond membrane, comprising: providing a substrate having an amorphous dielectric layer thereon, the amorphous dielectric layer comprising an exposed surface, the exposed surface having an isoelectric point of less than 7, preferably at most 6; seeding diamond nanoparticles onto the exposed surface; growing a diamond layer from the seeded diamond nanoparticles; and removing a portion of the substrate from underneath the diamond layer, the removed portion extending at least up to the amorphous dielectric layer, thereby forming the diamond membrane over the removed portion.

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Hasselt, Belgium

Giedrius Degutis