Korea Advanced Institute of Science and Technology

Gwangju Institute of Science and Technology

Geumbong Kang

Hyo-Hoon Park

Nam-Hyun Kwon

Hyeonho Yoon

Jong-Bum You

In Ki Kim

Dong-Eun Yoo

Ju-Beom Lee

Tae Joon Seok

Disclosed are an optical phased array chip and a method of manufacturing the same. The optical phased array chip includes a plurality of optical switches and a plurality of optical phased arrays implemented on a single integrated circuit, wherein the single integrated circuit includes a silicon substrate, a lower layer formed on an upper portion of the silicon substrate, a silicon layer formed on an upper portion of the lower layer, a first upper layer, a second upper layer and a third upper layer sequentially arranged on the silicon layer, and an electrode that penetrates through the first upper layer while being grounded to the silicon layer and is formed on an upper portion of the first upper layer.

Optical phased array chip using MEMS switch and manufacturing method thereof

Growing community of inventors

Daejeon, South Korea

Geumbong Kang