Leybold Systems Gmbh

Gert R&ouml;dling

Klaus Michael

Helmut Grimm

Tomas Baumecker

J&uuml;rgen Henrich

J&uuml;rgen Ulrich

Thomas Gebele

In an air lock for continuous introduction into and/or removal of workpieces from spaces ( ) separated atmospherically, the individual substrates ( ) are transported through a transfer channel ( ). At least one lock chamber ( ) serving to accommodate the substrates ( ) is arranged movably in the transfer channel ( ). During the substrate transport in the transfer channel ( ), the lock chamber ( ) is atmospherically separated both from the exterior ( ) having normal pressure and from the coating chamber ( ). The air lock ( ) includes a carrousel lock which has a carrousel housing ( ) and a lock chamber wheel ( ). On the periphery in the lock chamber wheel ( ) individual lock chambers ( ) are provided, in which the workpieces ( ) to be brought into the chamber to be loaded ( ) are inserted freely accessible on the normal pressure side. By turning the lock chamber wheel ( ), the substrates ( ) in the lock chambers ( ) are transported from the coating station &lsqb;sic; loading station&rsqb; (A) to the transfer station (B) into the treatment chamber ( ) diametrically opposite the normal pressure side. In the transfer station (B) the substrates ( ) are removed from the transfer channels ( ) by means of a transfer device ( &prime;) and are available for further treatment in the treatment chamber ( ).

Air lock for introducing substrates to and/or removing them from a treatment chamber

A vacuum chamber for flat substrates features transport rollers for transport of the substrates. These transport rollers are held from the sides in bearings and are additionally braced between the bearings by at least one middle bearing. These middle bearings are each located on a plunger which is guided hermetically through an opening in the bottom of the vacuum chamber and is braced against a support underneath the bottom.

Vacuum chamber for flat substrates

In an air lock for continuous introduction into and/or removal of workpieces from spaces (,) separated atmospherically, the individual substrates (,) are transported through a transfer channel (,). At least one lock chamber (,) serving to accommodate the substrates (,) is arranged movably in the transfer channel (,). During the substrate transport in the transfer channel (,), the lock chamber (,) is atmospherically separated both from the exterior (,) having normal pressure and from the coating chamber (,). The air lock (,) includes a carrousel lock which has a carrousel housing (,) and a lock chamber wheel (,). On the periphery in the lock chamber wheel (,) individual lock chambers (,) are provided, in which the workpieces (,) to be brought into the chamber to be loaded (,) are inserted freely accessible on the normal pressure side. By turning the lock chamber wheel (,), the substrates (,) in the lock chambers (,) are transported from the coating station (A) to the transfer station (B) into the treatment chamber (,) diametrically opposite the normal pressure side. In the transfer station (B) the substrates (,) are removed from the transfer channels (,) by means of a transfer device (,&prime;) and are available for further treatment in the treatment chamber (,). The treatment chamber (,) includes, for instance, of a vacuum-coating chamber in which the workpieces (,) as the substrates to be coated are coated by a vacuum-supported coating method.

Growing community of inventors

Obertshausen, Germany

Gert Rödling

Growing community of inventors

Obertshausen, Germany

Gert R&ouml;dling

Gert Rödling