Imego Ab

Stmicroelectronics S.r.l.

Stmicroelectronics Gmbh

Autoliv Development Ab

Stmicroelectronics International N.v.

Pgs Geophysical As

Acreo Swedish Ict Ab

Rise Acreo Ab

Rise Acreo Ae

Gert Ingvar Andersson

Nils Einar Hedenstierna

David Westberg

Carlo Valzasina

Matteo Fabio Brunetto

Huantong Zhang

Erik Svensson

Borys Stoew

Erik Daniel Svensson

Per Svensson

Leif Roland Bergstedt

Anders P Larsson

Mats Carlsson

Fredrik Nikolajeff

Milena Anguelova

Sverker Hård

Nils Hiedenstierna

Britta Ottosson

Henrik Rodjegard

Anna-Lena Hård, Legal Representative

Henrik Rödjegård

Stefan Bengtsson

Sjoerd Haasl

Alexandra Nafari

Zhang Huantong

A gyroscope includes a substrate, a first structure, a second structure and a third structure elastically coupled to the substrate and movable along a first axis. The first and second structure are arranged at opposite sides of the third structure with respect to the first axis A driving system is configured to oscillate the first and second structure along the first axis in phase with one another and in phase opposition with the third structure. The first, second and third structure are provided with respective sets of sensing electrodes, configured to be displaced along a second axis perpendicular to the first axis in response to rotations of the substrate about a third axis perpendicular to the first axis and to the second axis.

Microelectromechanical gyroscope with rejection of disturbances and method of sensing an angular rate

The present invention relates to a gyroscope sensor for detecting a rotational motion about a sensitivity axis and comprising means for quadrature compensation. The gyroscope sensor comprises a total inertial mass comprising a first inertial mass and a second inertial mass physically attached to each other and arranged such that a rotation of the first inertial mass about a detection axis caused by the coriolis force when the gyroscope sensor is subjected to a rotation about a sensitivity axis. The gyroscope further comprises a first drive structure having a displaceable drive frame which may cause a respective of the first or second inertial mass to rotate about the detection axis in order to compensate for quadrature errors originating from faulty coupling between a drive mode and a sense mode of the gyroscope sensor.

Quadrature compensation method for MEMS gyroscopes and a gyroscope sensor

A sensor is disclosed for detecting a rotational motion about a resulting sensitivity axis. The sensor includes at least two dual mass gyroscope units, each of the gyroscope units are adapted to detect a rotational motion about a sensitivity axis of the respective gyroscope unit. The sensitivity axes being parallel to each other and to the resulting sensitivity axis. The gyroscope units are interconnected at the inertial masses of the gyroscope units which cause the gyroscope unit to operate synchronously.

MEMS gyro

A device for measuring force components formed from a single crystal material, wherein the device comprises at least one cantilever beam inclined to a wafer plane normal and formed in one piece with a mass body, which mass body provides a mass of inertia. The mass body has a first and a second major surface which are substantially parallel with a wafer plane. A mass body cross section presents a portion which is substantially symmetrical along a centrally (in the thickness direction) located plane parallel with the wafer plane. Disclosed is also a method for its production and an accelerometer comprising at least one such device. The device allow for a more compact 3-axis accelerometer.

Device for measuring force components, and method for its production

A modulator is provided in operative engagement with a sensor element having a plurality of electrodes. The modulator has a single-bit quantizer electrically connected to a digital accumulator. The accumulator accumulates output information received from the single-bit quantizer. The accumulator converts the accumulated output information received from the single-bit quantizer to a multi-bit feedback signal and sends the multi-bit feedback signal in a primary feedback loop back to the sensor element. The quantizer sends a single-bit feedback signal in a secondary feedback loop back to a point before the quantizer.

Method for using a sensor system having a single-bit quantizer and a multi-bit feedback loop

The invention relates to a method of producing a movable lens structure that comprises the steps of: forming a lens from a lens material disposed on a carrier of another material (step), and forming a micromechanical structure from the carrier (step), wherein the forming of the lens takes place before the forming of the micromechanical structure. With this method a simplified production method is obtained that simplifies difficult compatibility requirements between micromechanics and lens that can otherwise be hard to meet.

Method of producing a movable lens structure for a light shaping unit

The present invention is related to sensor arrangements and particularly to sensor arrangements for symmetric response in a x-, y- and z-coordinate system. The arrangement comprises four gyroscopes with one axis arranged into different directions of sensitivity.

Sensor device

The present invention relates to a method of bonding a first member () to a second silicon member () through anodic bonding. The method comprises the steps of selectively depositing on said first member bondable sections () before bringing said first and second members together for anodic bonding.

Method relating to anodic bonding

A gyroscope that may include various sources of error, with those sources of error each being dependent upon a different parameter, is associated with a simulation or &ldquo;model&rdquo; of the gyroscope which is typically a computer simulation. The computer simulation is provided with errors which can be adjusted to be identical with the errors present in the real gyroscope. An arrangement is provided to adjust the errors in the model of the gyroscope to be identical with the errors in the real gyroscope, that arrangement including Kalman filters which receive signals generated by subtracting the outputs of the real gyroscope and the model gyroscope, while simultaneously varying the various inputs to the real gyroscope. The Kalman filters also generate a signal which is an estimate of the angular rotation being sensed by the real gyroscope. When the model of the gyroscope is running in perfect synchronism with the real gyroscope, it can be assumed that all of the errors in the real gyroscope are replicated in the model gyroscope, and the estimate of angular rotation being supplied to the model gyroscope is actually equal to the real angular rotation being sensed by the real gyroscope.

Off-set elimination system for a vibrating gyroscope

In a sensor for measuring angular velocity a body is formed from a planer substrate The body defines a beam, the opposed ends of which are adapted to be fixed in position, the beam having a preferential bending direction which makes an acute angle with the plane of the planar substrate. The beam carries an inertia mass comprising two arms interconnected by a connecting bar, the central part of the connecting bar being formed integrally with part of the beam. Capacitative plates located adjacent a conductive layer on the arms are provided with potentials which cause the inertia mass to rotate about the axis of the connecting bar with a &ldquo;see-saw&rdquo; action which, because of the configuration of the beam leads to a rotational oscillation of the inertia mass in the plane of the substrate. If the arrangement is rotated about an axis coincident with the connecting bar, the inertia mass rotates about an axis coincident with the beam with an oscillating rotation. This is detected by capacitative plates to determine angular velocity.

Arrangement for measuring angular velocity

The invention refers to a micromechanical switching device including at least two contact elements ( ), which are provided at least partly movable relative each other and via thermal actuation can be closed and opened, whereby the contact elements ( ) at least partly are comprised of at least two materials ( ) with essentially different thermal expansion coefficients. The contact elements ( ) at excitation are arranged to displace essentially in same level and in different directions.

Device for micromechanical switching of signals

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Lindome, Sweden

Gert Ingvar Andersson