Asml Netherlands B.v.

Gerrit Streutker

Erik Roelof Loopstra

Arno Jan Bleeker

Timotheus Franciscus Sengers

Heine Melle Mulder

Laurentius Catrinus Jorritsma

Oscar Franciscus Jozephus Noordman

Mark Trentelman

An illuminator for a lithographic apparatus includes a first illuminator channel, a second illuminator channel, a first switch device, an additional illuminator part and a second switch device. Each of the first and the second illuminator channel includes elements which are adjustable to provide a radiation beam with at least one desired property. The first switch device is configured to receive the radiation beam and arranged to direct the radiation beam between the first and second illuminator channels. The second switch device is arranged to receive the radiation beam from the first and second illuminator channels and direct the radiation beam through the additional illuminator part. The additional illuminator part includes elements which apply at least one additional desired property to the radiation beam.

Stage apparatus, lithographic apparatus and device manufacturing method having switch device for two illumination channels

A lithographic apparatus includes a masking device that includes a first masking part configured to obscure a first part of a first patterning device before the pattern of the first patterning device is impinged by a radiation beam, a second masking part having an adjustable length, the second masking part configured to obscure a second part of the first patterning device after the pattern of the first patterning device is impinged by the radiation beam and to obscure a first part of a second patterning device before the pattern of the second patterning device is impinged by the radiation beam, and a third masking part configured to obscure a second part of the second patterning device after the pattern of the second patterning device is impinged by the radiation beam.

Lithographic apparatus having masking parts and device manufacturing method

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Eindhoven, Netherlands

Gerrit Streutker