Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek Tno

Asml Netherlands B.v.

Gerrit Oosterhuis

René Jos Houben

Antonius Paulus Aulbers

Ronaldus Jacobus Johannes Boot

Hans Jansen

Teunis Cornelis Van Den Dool

Gerben Pieterse

Leonardus Antonius Maria Brouwers

Anthonius Martinus Cornelis Petrus De Jong

Jacques Cor Johan Van Der Donck

Josephus Cornelius Johannes Antonius Vugts

Jeroen Anthonius Smeltink

Egbert Anne Martijn Brouwer

Johannes Adrianus Cornelis Theeuwes

Frits Verhoeven

Jan J Smits

A method for providing position control information for controlling an impingement position of a laser beam for treatment of a chip die in a chip manufacturing process, comprises the steps of a) receiving a specification of positions (x,y) of a electrically conductive elements in the chip die, the positions having a first coordinate along a first direction (x) and a second coordinate (y) along a second direction in a plane defined by the chip die, said first and second direction being mutually transverse to each other, b) selecting a cluster of positions that is within a predetermined two-dimensional spatial range, wherein each pair of positions in the cluster at least has a first minimum difference in their first coordinates or a second minimum difference in their second coordinates and removing the next position from the ordered set, c) update the positions of the set of positions in accordance with an expected time needed to carry out the treatment for said cluster and a speed of a wafer comprising the chip die, d) repeating steps b-d until each of the positions in said set is assigned to a cluster.

Providing a chip die with electrically conductive elements

A method of cleaning a lithography apparatus using an aerosol spray is described. The spray from the aerosol is contained in a space.

Lithographic apparatus and method of cleaning a surface of an immersion lithographic apparatus

The invention provides a method for applying a material onto a substrate using a droplet printing technique wherein a gas stream is released into the direction of a substrate, which gas stream comprises a carrier gas and droplets of a suspension of the material or droplets of a solution of a precursor of the material or droplets of a precursor of the material as such, whereby the droplets in the gas stream are first maintained in a steady flow and subsequently in a converging flow before the droplets are contacted with the substrate. The invention further provides an apparatus for carrying out said method.

Method and apparatus for applying a material on a substrate

In one aspect, the invention provides a system and method for spray drying a fluid. The system comprises a fluid reservoir (), a spraying device () that comprises at least one outflow opening () for projecting droplets of fluid () from the reservoir () out of the at least one outflow opening () and at least one energy source () for at least partially drying the droplets. The spraying device () is arranged to project the droplets into a determinable droplet trajectory and the at least one energy source () is arranged for providing energy focused substantially on the droplet trajectory. It is an object of the invention to provide a system and method for reducing the amount of energy required for spray drying.

Effective droplet drying

A method and droplet selection device are provided for a continuous printer for selectively deflecting a droplet from a predetermined printing trajectory. In particular, a droplet selection device is provided for a continuous printer, comprising a droplet ejection system arranged to generate a continuous stream of droplets from a first fluid jetted out of an outlet channel; and a jet system arranged to generate a second jet for colliding the jet into the stream of droplets. The jet system comprises a deflector to selectively deflect the second jet into the continuous stream of droplets, so as to selectively deflect the droplets from a predefined printing trajectory.

Droplet selection mechanism

A method and droplet selection device are provided for a continuous printer for selectively ejecting a second droplet and to have it collided with a predefined first droplet. In particular, the device comprises a first droplet ejection system arranged to generate a continuous stream of first droplets from a fluid jetted out of an outlet channel; and a second droplet ejection system arranged to generate second droplets for colliding the second droplets into the first droplets so as to selectively deflect the first droplets from a predefined printing trajectory. The second droplet ejection system comprises a control circuit to selectively eject the second droplet and to have it collided with a predefined first droplet.

Greenhouse system may comprise an illumination, a sensor, and a controller. The illumination and controller are arranged to vary the intensity and the spectral distribution of the light emitted by the illumination. The emitted light may be pulsed light, the pulse characteristics being variable by the controller in dependency of the output of the sensor. The controller is arranged to interpret the relevant variables measured by the sensor and to assess the actual and/or expected growth of the relevant plants, and to control the intensity and/or the spectral distribution of the light emitted by the illumination. Some sensors may be provided for measuring the intensity and/or spectral distribution of the actual light in the greenhouse, other sensors for measuring plant dimensions of the relevant plants or plant groups. The illumination may comprise a heat collector which can be connected to heating or air conditioning inside or outside the greenhouse.

Growing community of inventors

Best, Netherlands

Gerrit Oosterhuis