Phenom-World Holding B.v.

Gerhardus Bernardus Stamsnijder

Karel D Van Der Mast

Sander Richard Marie Stoks

Adrianus Franciscus Johannes Hammen

Ton Antonius Cornelis Henricus Kluijtmans

Paul Cornelis Maria Van Den Bos

Sample stage, e.g. for use in a scanning electron microscope. The sample stage includes a base, a sample carrier, and an actuator assembly arranged for moving the sample carrier in at least one direction substantially parallel to the base. The actuator assembly is arranged so as not to contribute to the mechanical stiffness of the sample stage from the sample carrier to the base.

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Eindhoven, Netherlands

Gerhardus Bernardus Stamsnijder