Robert Boschgmbh

Gerhard Wucher

Wolfram Bauer

Markus Lutz

Burkhard Kuhlmann

Karsten Funk

Reinhard Neul

Jochen Franz

Joerg Hauer

Christian Doering

Rainer Willig

Udo Bischof

Michael Fehrenbach

Andreas Thomae

Siegbert Goetz

Udo-Martin Gomez

Christoph Lang

Thomas Mayer

Michael Veith

Thomas Walker

Ermin Esch

Martin Wrede

Wolfgang Hellwig

Markus Brockmann

Hans-Dieter Schwarz

Dirk Droste

Arnd Gangei

Udo Gomez

Burhard Kuhlmann

An oscillating circuit includes an analog oscillation element. The oscillating circuit includes at least one analog-to-digital conversion device. A method is for operating an oscillating circuit, in which a mechanical oscillator oscillates at a natural frequency. The oscillation amplitude is measured and digitized. A digital control signal is generated from this with the aid of a digital amplitude controller. A driving signal is generated, in turn, from the digital control signal, the driving signal driving the mechanical oscillator with the aid of a drive unit. This control loop stabilizes the oscillation amplitude.

Oscillating circuit having an analog oscillating element

A circuit for converting the capacitive signal change of a differential capacitor into digital signals, the circuit including a sigma delta modulator. The differential capacitor is a component of the signal feed structure and the reference feedback structure of the sigma delta modulator.

Sigma delta modulator

An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.

Micromechanical rotational rate sensor

A yaw-rate sensor is proposed having a first and a second Coriolis element ( ) which are arranged side-by-side above a surface ( ) of a substrate. The Coriolis elements ( ) are induced to oscillate parallel to a first axis. Due to a Coriolis force, the Coriolis elements ( ) are deflected in a second axis which is perpendicular to the first axis. The first and second Coriolis elements ( ) are coupled by a spring ( ) which is designed to be yielding in the first and in the second axis. Thus, the frequencies of the oscillations in the two axes are developed differently for the in-phase and antiphase oscillation.

Rotation speed sensor

A yaw-rate sensor including a first and a second Coriolis element that are arranged side-by-side above a surface of a substrate. The Coriolis elements are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements occur in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.

Rotation rate sensor

An rate-of-rotation sensor having a Coriolis element, which is arranged over a surface of a substrate, is described. The Coriolis element is induced to oscillate in parallel to a first axis. In response to a Coriolis force, the Coriolis element is deflected in a second axis, which is perpendicular to the first axis. A proof element is provided to prove the deflection.

Rotational speed sensor

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Reutlingen, Germany

Gerhard Wucher