Leybold Vakuum Gmbh

Leybold Gmbh

Gerhard Wilhelm Walter

Christian Beyer

Gunter Schutz

Heinrich Engl&auml;nder

Markus Henry

Ralf Adamietz

Hans-Rudolf Fischer

Holger Dietz

Guenter Holstein

A leak detection device has a test chamber which, for evacuation, is connected to an evacuation pump device. Moreover, the test chamber is connected by a test gas line to a test gas pump device. The test gas pump device is connected, at its main inlet, to a test gas detector, such that a detection of test gas can take place using the counter-current principle. A valve device is arranged in the test gas line. This valve device has a test gas chamber for temporary storage of test gas removed from the test chamber.

Leak detection device and method for checking objects for fluid tightness by means of a leak detection device

The invention relates to a friction vacuum pump ( ) with a stator ( ) and a rotor ( ), which form at least two pump stages ( ) with one gas inlet ( ) each, as well as with junction for the pump stages, which are equipped with junction openings ( ) and serve for the connection of the gas inlets ( ) of the pump stages with devices to be evacuated; in order to avoid high conductance losses it is proposed that the junction openings ( ) are located in a plane which is disposed laterally adjacent to the pump stages ( ) such that the distance between the junction openings ( ) and the rotor axis ( ) is of minimum feasible size.

Friction vacuum pump with a stator and a rotor

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Cologne, Germany

Gerhard Wilhelm Walter