Oerlikon Trading Ag, Trubbach

Oerlikon Trading Ag, Truebbach

Oerlikon Surface Solutions Ag, Pfaffikon

Gerhard Tuymer

Jürgen Ramm

Daniel Lendi

Andreas Schutze

Andreas SCHÜTZE

A vacuum plasma generator with an output for feeding a plasma discharge for treatment of workpieces in a vacuum chamber has a connection for the junction to AC voltage mains, a rectifier connected to a converter with a control input for the setting and/or regulation of the converter output voltage, and a controlled full bridge circuit connected to the converter output with a potential-free generator output, which transposes the converter output voltage into pulses of 1 to 500 kHz. A potential-isolating transformer is switched into the bridge for the galvanic decoupling of the generator output.

Vacuum plasma generator

The invention relates to a vacuum plasma generator for providing a plasma discharge () for treating work pieces () by way of a pulsed plasma process in a vacuum chamber (). Said vacuum plasma generator comprises a generator output (') having an AC mains supply (), an AC/DC mains rectifier system () for rectifying the AC mains voltage to a DC voltage, a filter capacitor (), a first stage as clocked DC/DC voltage converter () with means for adjusting the DC output voltage which produces an intermediate circuit voltage (Uz), comprising a controlled power switch () which feeds the primary winding of a transformer () and the secondary winding of which is connected to a rectifier () and a downstream intermediate capacitor () and configures a floating transformer secondary circuit (). Said secondary circuit is connected to a downstream second stage which is a pulse output stage () and is connected to the generator output (&#x2032;). The DC/DC voltage converter () has at least two floating transformer secondary circuits () and comprises a switch-over device () with a switch controller () for optionally switching the floating transformer secondary circuits () in parallel or in series.

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Bad Schallerbach, Austria

Gerhard Tuymer