Applied Materials, Inc.

Applied Materials Gmbh & Co Kg

Gerhard Rist

Jürgen Henrich

Roland Trassl

Gert Rödling

Jian Liu

Stephan Wieder

Guido Hattendorf

The present invention relates to a method for manufacturing a backside contact of a semiconductor component, in particular, of a solar cell, comprising a metallic layer on the backside of a substrate in a vacuum treatment chamber, and the use of a vacuum treatment system for performing said method. Through this method and its use, in particular silicon based solar cells, can be provided with a back contact in a simple manner in a continuous process sequence, wherein the process sequence can be provided particularly efficient and economical, since no handling systems for rotating the substrate are required, and in particular silk screening steps can be dispensed with.

Method for producing a metal backside contact of a semiconductor component, in particular, a solar cell

The invention relates to an energy and media connection module for coating installations. Said module serves for supplying with cooling water, compressed air, process gases, signal, control and cathode power. It can be moved from one coating chamber to another coating chamber along a coating line by a single person in a short time. Further, it is possible to separate the energy connection module from a coating chamber for maintenance or displacement purposes without mechanically demounting all connections.

Energy and media connection for a coating installation comprising several chambers

Growing community of inventors

Langenselbold, Germany

Gerhard Rist