Max-planck-gesellschaft Zur F&#xf6;rderung Der Wissenschaften E. V.

Gerhard Muller

Walter E Spear

Siegfried Kalbitzer

Peter G Le Comber

To provide for effective doping and obtain substantial conductivity change in amorphous semiconductor material, typically silicon, a body of said material is raised to a temperature above about 20.degree. C. and below the recrystallization temperature, for example in the range of between 100.degree. C., preferably above 200.degree.-250.degree. C. and below about 450.degree. C. during the ion implantation. The doping ions are, for example for silicon, of groups III and V of the periodic system, particularly boron and phosphorus. Semiconductor junctions can be made by this process by selectively doping spatially limited regions of the semiconductor body to thereby produce semiconductor components by doping with ions of different characteristics, for example of different conductivity type.

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Heidelberg, Germany

Gerhard Muller