Carl Zeiss Smt Gmbh

Carl Zeiss X-ray Microscopy, Inc.

Carl Zeiss Meditec Ag

Carl Zeiss Microscopy Gmbh

Carl Zeiss Ag

Gerhard Krampert

Ralf Wolleschensky

Thomas Kalkbrenner

Heiko Feldmann

Ingo Kleppe

Ralf Netz

Johannes Ruoff

Michael Kempe

Daniel Bublitz

Lars Stoppe

Thomas Anthony Case

Stefan Richter

Timo Mappes

Martin Kühner

Johannes Kindt

Kai Wicker

Christoph Hilmar Graf Vom Hagen

Robert Pomraenke

Moritz Schmidlin

Thomas Matthew Gregorich

Juan Atkinson Mora

Philipp HÜBNER

A detection system serves for X-ray inspection of an object. An imaging optical arrangement serves to image the object in an object plane illuminated by X-rays generated by an X-ray source. The imaging optical arrangement comprises an imaging optics to image a transfer field in a field plane into a detection field in a detection plane. A detection array is arranged at the detection field. An object mount holds the object to be imaged and is movable relative to the X-ray source via an object displacement drive along at least one lateral object displacement direction in the object plane. A shield stop with a transmissive shield stop aperture is arranged in an arrangement plane in a light path and is movable via a shield stop displacement drive in the arrangement plane. A control device has a drive control unit, which is in signal connection with the shield stop displacement drive and with the object displacement drive for synchronizing a movement of the shield stop displacement drive and the object displacement drive. The result is an optimization of an X-ray illumination of the object to achieve a high-resolution object imaging.

Detection system for X-ray inspection of an object

Growing community of inventors

Pleasanton, CA, United States of America

Gerhard Krampert