Leybold-heraeus Gmbh & Co. Kg

Leybold-heraeus Gmbh

Gerhard Kienel

Volker Bauer

Klaus Hartig

Albert Feuerstein

Helmut Petersein

Helmuth Lammermann

Wolfgang Zirkel

A method and apparatus is disclosed for the reactive deposition of vapors of metal compounds onto substrates by the evaporation of at least one metal by means of an electron beam in an atmosphere consisting of the reaction gas, at pressures of no more than 10.sup.-1 mbar. An electrode positively biased with respect to ground and having an acceleration voltage of at least 20 kV is disposed in the area of the vapor stream flowing to the substrate. The metal vapor is produced in an internal chamber which surrounds the evaporator and has a masked orifice opposite the substrate. The reaction gas is introduced into the internal chamber and the metal vapor and reaction gas are guided by the masked orifice toward the substrate.

Method and apparatus for the reactive vapor depositing of metal compounds

An optical body and a method of producing oxidic, antireflective coatings on transparent plastic substrates of polydiethyleneglycoldiallylcarbonate comprising depositing a first coating having a high refractive index by vaporizing an oxide mixture of essentially zirconium dioxide with a content of 4 to 15 weight percent of aluminum trioxide and depositing a second layer having a low refractive index by vaporizing in a vacuum a borosilicate glass containing less than 5 weight-percent of alkali metal oxides. The depositing of at least the first coating is performed in an oxidizing residual gas atmosphere.

Method of producing antireflective coatings on

An optical body and a method of producing same comprising a transparent plastic substrate composed of an acrylate, preferably polymethylmethacrylate, depositing a first coat having a high refraction index on the substrate by vaporizing an oxide mixture of substantially zirconium dioxide with a content of 4 to 15 percent weight percent of aluminum oxide and depositing a second coat having a low refractive index by devaporization in a vacuum of a borosilicate glass containing less than 5 weight-percent of alkali metal oxides. The application of at least the first coat is performed in an oxidizing residual gas atmosphere.

Method of producing antireflective coatings on acrylic glasses, optical

Electron beam vaporizer having a beam generator with a heated cathode, focusing means and electromagnetic deflection means for the deflection and guidance of the beam. An exchangeable, fluid-cooled and preferably rotatable vaporizing crucible associated with the beam generator and having at least one depression in the base thereof for at least one substance to be vaporized. The crucible has passages for the flow of a coolant beneath the depression and the base of the vaporizing crucible is constructed as separate components having a common contact surface so that a removable crucible head is formed. The crucible base is closed off from its environment with regard to the flow passages.

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Hanau, Germany

Gerhard Kienel